Physical evaporation of SiO and SiO2 under ultra-high vacuum conditions was monitored in situ with infrared spectroscopy at frequencies between 450 cm−1 and 5000 cm−1. The measured vibrational spectra of the condensed films are identical in both cases, for SiO and SiO2 evaporation, and can be described with four Brendel oscillators located at 380 cm−1, 713 cm−1, 982 cm−1, and 1101 cm−1, corresponding to typical vibration modes in SiO.
M. Klevenz, S. Wetzel, M. Möller, and A. Pucci, "Evaporation and Condensation of SiO and SiO2 Studied by Infrared Spectroscopy," Appl. Spectrosc. 64, 298-303 (2010)