OSA's Digital Library

Applied Spectroscopy

Applied Spectroscopy

| PUBLISHED BY SAS — AVAILABLE FROM SAS AND OSA

  • Vol. 67, Iss. 1 — Jan. 1, 2013
  • pp: 1–21

Application of Spectroscopic Ellipsometry and Mueller Ellipsometry to Optical Characterization

Enric Garcia-Caurel, Antonello De Martino, Jean-Paul Gaston, and Li Yan

Applied Spectroscopy, Vol. 67, Issue 1, pp. 1-21 (2013)


View Full Text Article

Acrobat PDF (2508 KB) Open Access





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

This article provides a brief overview of both established and novel ellipsometry techniques, as well as their applications. Ellipsometry is an indirect optical technique, in that information about the physical properties of a sample is obtained through modeling analysis. Standard ellipsometry is typically used to characterize optically isotropic bulk and/or layered materials. More advanced techniques such as Mueller ellipsometry, also known as polarimetry in the literature, are necessary for the complete and accurate characterization of anisotropic and/or depolarizing samples that occur in many instances, both in research and in real-life activities. In this article, we cover three main subject areas: Basic theory of polarization, standard ellipsometry, and Mueller ellipsometry. The first section is devoted to a short, pedagogical introduction of the formalisms used to describe light polarization. The second section is devoted to standard ellipsometry. The focus is on the experimental aspects, including both pros and cons of commercially available instruments. The third section is devoted to recent advances in Mueller ellipsometry. Application examples are provided in the second and third sections to illustrate how each technique works.

Virtual Issues
Vol. 8, Iss. 2 Virtual Journal for Biomedical Optics

Citation
Enric Garcia-Caurel, Antonello De Martino, Jean-Paul Gaston, and Li Yan, "Application of Spectroscopic Ellipsometry and Mueller Ellipsometry to Optical Characterization," Appl. Spectrosc. 67, 1-21 (2013)
http://www.opticsinfobase.org/as/abstract.cfm?URI=as-67-1-1


Sort:  Journal  |  Reset

References

References are not available for this paper.

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited