Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Chinese Optics Letters
  • Vol. 1,
  • Issue 3,
  • pp. 139-141
  • (2003)

Novel MEMS variable optical attenuator

Not Accessible

Your library or personal account may give you access

Abstract

A novel MEMS variable optical attenuator (VOA), which has completely different attenuation mechanism from those in literatures, is proposed and demonstrated in this paper. The basic operation principle is that the optical power coupled between two initially aligned single-mode fibers will be continuously attenuated while the end of one of the fibers is deflected from the initial position. A micromachined solenoid type inductor with a U-shaped permalloy magnetic core is used to attract the deflectable fiber that has a permalloy coat on its end. To fabricate the multi-layer three-dimensional inductive component, a new UV-LIGA process for thick photoresists is developed, combining advantages of both SU-8 and AZ-4000series photoresists. The inductive component is approximately 1.7 mm×1.3 mm×50 ?m in size and has a low resistance value (~2.1 ?). The whole size of the VOA before packaging is 30 mm×2 mm×0.6 mm. The first prototype shows less then 3-dB insertion loss at 0-dB attenuation and nearly 40-dB attenuation range with less than 20 mW electrical input power at wavelength 1550 nm.

© 2005 Chinese Optics Letters

PDF Article
More Like This
Single-mode fiber variable optical attenuator based on a ferrofluid shutter

Anna Duduś, Robert Blue, and Deepak Uttamchandani
Appl. Opt. 54(8) 1952-1957 (2015)

Integrated microfluidic variable optical attenuator

Lin Zhu, Yanyi Huang, and Amnon Yariv
Opt. Express 13(24) 9916-9921 (2005)

Compact plasmonic variable optical attenuator

Kristjan Leosson, Tiberiu Rosenzveig, Petur Gordon Hermannsson, and Alexandra Boltasseva
Opt. Express 16(20) 15546-15552 (2008)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved