OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Editor: Zhizhan Xu
  • Vol. 10, Iss. 7 — Jul. 1, 2012
  • pp: 071201–071201

Measurement accuracy verification of aspheric surface test with computer-generated hologram

Hua Liu  »View Author Affiliations


Chinese Optics Letters, Vol. 10, Issue 7, pp. 071201-071201 (2012)


View Full Text Article

Acrobat PDF (393 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

A convex aspheric surface using a computer-generated hologram (CGH) test plate fabricated with novel techniques and equipment is tested. However, the measurement result is not verified via comparison with other methods. To verify the accuracy of the measurement, a perfect sphere surface is measured by the following. The measurement result is quantified into four parts: the figure error from the tested spherical surface; the figure error from the reference spherical surface; the error from the hologram; and the adjustment error from misalignment. The measurement result, removed from the later three errors, shows agreement to 4-nm RMS with the test by Zygo interfermeter of the same surface. Analysis of the CGH test showed the overall accuracy of the 4-nm RMS, with 3.9 nm from the test plate figure, 0.5 nm from the hologram, and 0.74 nm from other sources, such as random vibration, various second order effects, and so on. Thus, the measurement accuracy using the proposed CGH could be very high. CGH can therefore be used to measure aspheric surfaces accurately.

© 2012 Chinese Optics Letters

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(090.1760) Holography : Computer holography
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(220.1250) Optical design and fabrication : Aspherics

ToC Category:
Instrumentation, Measurement, and Metrology

Citation
Hua Liu, "Measurement accuracy verification of aspheric surface test with computer-generated hologram," Chin. Opt. Lett. 10, 071201-071201 (2012)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-10-7-071201

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited