Abstract
The design of a two-dimensional (2D) microscanner actuated electrostatically is
presented, and a silicon-oninsulator (SOI) micromachining process is utilized to fabricate the
sample. The microscanner can oscillate at inherent frequencies of 1146 and 360 Hz around two
rotational axes, generating maximum twisting angles of ±10° and ±5.3° under two 10-V square waves,
respectively. A monochromatic laser projection system based on Lissajous pattern is demonstrated
using the developed microscanner, revealing an image resolution of 168 × 56 at 20 frames per
second.
© 2013 Chinese Optics Letters
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