A novel broadband transmission method to determine polymer film thickness during manufacturing is proposed, and a measurement system is developed based on this method. The relationship between broadband optical power and film thickness is deduced according to the Lambert-Beer law. The system is composed of a halogen light and an optical power meter. Results show that the measurement error of this method is approximately 1 \mm m, and the resolution of the system is below 0.4 μm for polymer films with less than 100-μm thickness.
© 2013 Chinese Optics Letters
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.7000) Instrumentation, measurement, and metrology : Transmission
(160.4890) Materials : Organic materials
Instrumentation, Measurement, and Metrology
Chao Qiu, Xiaogang Sun, and Meisheng Luan, "Determining polymer film thickness during manufacturing with broadband transmission," Chin. Opt. Lett. 11, 071201- (2013)