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Chinese Optics Letters

Chinese Optics Letters


  • Vol. 2, Iss. 7 — Jul. 10, 2004
  • pp: 396–398

A modified moire interferometer for three-dimensional displacement measurement

Weining Wang and Jianhai Sun  »View Author Affiliations

Chinese Optics Letters, Vol. 2, Issue 7, pp. 396-398 (2004)

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This paper presents a new optical interferometric system, MMI-T/G, composed of a modified four-beam moire interferometer and a Twyman/Green interferometer. The MMI-T/G system can measure three-dimensional displacement fringe patterns with a single loading on the specimen, and the in-plane and out-of-plane displacement fields can be measured independently and defined clearly. The optical setup has the advantages of structural novelty, flexibility, and high fringe contrast. Moreover, the in-plane displacement sensitivity is twice of that of the normal moire interferometer. The measuring techniques to obtain the fringe patterns and displacement fields using the MMI-T/G system are described. The experimental results of thermal displacement of an electronic device are shown.

© 2005 Chinese Optics Letters

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4120) Instrumentation, measurement, and metrology : Moire' techniques

Weining Wang and Jianhai Sun, "A modified moire interferometer for three-dimensional displacement measurement," Chin. Opt. Lett. 2, 396-398 (2004)

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