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Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 6, Iss. 2 — Feb. 1, 2008
  • pp: 149–151

Novel optical lithography using silver superlens

Haiyan Qin, Xuan Li, and Su Shen  »View Author Affiliations


Chinese Optics Letters, Vol. 6, Issue 2, pp. 149-151 (2008)


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Abstract

This work has demonstrated that with silver superlens, the resolution of conventional optical lithography can be improved significantly. Experimental and simulative results are given to verify the facts that the resolution and the pattern fidelity are sensitive to the contact tightness between layers.

© 2008 Chinese Optics Letters

OCIS Codes
(080.3630) Geometric optics : Lenses
(220.3740) Optical design and fabrication : Lithography

Citation
Haiyan Qin, Xuan Li, and Su Shen, "Novel optical lithography using silver superlens," Chin. Opt. Lett. 6, 149-151 (2008)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-6-2-149


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