OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 8, Iss. 3 — Mar. 1, 2010
  • pp: 296–299

Detection of subsurface defects of fused silica optics by confocal scattering microscopy

Bin Ma, Zhengxiang Shen, Pengfei He, Yiqin Ji, Tian Sang, Huasong Liu, Dandan Liu, and Zhanshan Wang  »View Author Affiliations


Chinese Optics Letters, Vol. 8, Issue 3, pp. 296-299 (2010)


View Full Text Article

Acrobat PDF (1212 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

A non-destructive technique for subsurface measurements is proposed by combining light scattering method with laser confocal scanning tomography. The depth and distribution of subsurface defect layers are represented in term of scattered light intensity pattern, and three types of fused silica specimens are fabricated by different grinding and polishing processes to verify the validity and effectiveness. By using the direct measurement method with such technique, micron-scale cracks and scratches can be easily distinguished, and the instructional subsurface defect depths of 55, 15, and 4 μ m are given in real time allowing for an in-process observation and detection.

© 2010 Chinese Optics Letters

OCIS Codes
(110.0180) Imaging systems : Microscopy
(140.3330) Lasers and laser optics : Laser damage
(220.5450) Optical design and fabrication : Polishing
(290.5850) Scattering : Scattering, particles
(290.5825) Scattering : Scattering theory

Citation
Bin Ma, Zhengxiang Shen, Pengfei He, Yiqin Ji, Tian Sang, Huasong Liu, Dandan Liu, and Zhanshan Wang, "Detection of subsurface defects of fused silica optics by confocal scattering microscopy," Chin. Opt. Lett. 8, 296-299 (2010)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-8-3-296


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. P. E. Miller, T. I. Suratwala, L. L. Wong, M. D. Feit, J. A. Menapace, P. J. Davis, and R. A. Steele, Proc. SPIE 5991, 599101 (2005).
  2. T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, J. Non-Cryst. Solids 352, 5601 (2006).
  3. D. Golini and S. D. Jacobs, Proc. SPIE 1333, 80 (1990).
  4. C. L. Battersby, L. M. Sheehan, and M. R. Kozlwski, Proc. SPIE 3578, 446 (1998).
  5. Z. M. Liao, S. J. Cohen, and J. R. Taylor, Proc. SPIE 2428, 43 (1995).
  6. D. Black, R. Polvani, L. Braun, B Hockey, and G. White, Proc. SPIE 3060, 102 (1997).
  7. J. Wang, R. L. Maier, and J. H. Burning, Proc. SPIE 5188, 106 (2003).
  8. G. Dussler, B. Brocher, and T. Pfeifer, Proc. SPIE 3825, 144 (1999).
  9. T. Zamofing and H. Hugli, Proc. SPIE 5265, 134 (2004).
  10. M. I. Mishchenko, L. D. Travis, and A. A. Lacis, Scattering, Absorption, and Emission of Light by Small Particles (Cambridge University Press, Cambridge, 2004).
  11. K.-N. Liou, Appl. Math. Comput. 3, 331 (1977).
  12. K. R. Fine, R. Garbe, T. Gip, and Q. Nguyen, Proc. SPIE 5799, 105 (2005).
  13. J. Neauport, P. Cormont, P. Legros, C. Ambard, and J. Destribats, Opt. Express 17, 3543 (2009).
  14. K. R. Spring, T. J. Fellers, and M. W. Davidson, "Resolution and contrast in confocal microscopy" http://www.olympusconfocal.com/throry/resolutionintro.html (Jan. 8, 2009).
  15. P. Torok and T. Wilson, Opt. Commun. 137, 127 (1997).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited