A micro-electro-mechanical system (MEMS) silicon-based non-silicon mirror for a 2D optical switch is designed, fabricated and measured. The result shows that the mirror has good reflective performance. And driven by static electricity, it can rotate more than 10°at voltage less than 15 V. This kind of novel mirror will have good potential applications for MEMS optical switches.
© 2005 Chinese Optics Letters
Yuan Luo, Hongqiao Fu, and Shanglian Huang, "Study on a MEMS silicon-based non-silicon mirror for an optical switch," Chin. Opt. Lett. 1, 616-618 (2003)