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Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 1, Iss. 10 — Oct. 20, 2003
  • pp: 616–618

Study on a MEMS silicon-based non-silicon mirror for an optical switch

Yuan Luo, Hongqiao Fu, and Shanglian Huang  »View Author Affiliations


Chinese Optics Letters, Vol. 1, Issue 10, pp. 616-618 (2003)


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Abstract

A micro-electro-mechanical system (MEMS) silicon-based non-silicon mirror for a 2D optical switch is designed, fabricated and measured. The result shows that the mirror has good reflective performance. And driven by static electricity, it can rotate more than 10°at voltage less than 15 V. This kind of novel mirror will have good potential applications for MEMS optical switches.

© 2005 Chinese Optics Letters

OCIS Codes
(230.0230) Optical devices : Optical devices
(230.4040) Optical devices : Mirrors

Citation
Yuan Luo, Hongqiao Fu, and Shanglian Huang, "Study on a MEMS silicon-based non-silicon mirror for an optical switch," Chin. Opt. Lett. 1, 616-618 (2003)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-1-10-616


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References

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  5. Y. Y. Wang, T. I. Kamins, and B. Y. Zhao, Polysilicon Film and its Application at IC (in Chinese) (Science in China Press, Beijing, 1988).

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