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Optica Publishing Group
  • Chinese Optics Letters
  • Vol. 1,
  • Issue 10,
  • pp. 616-618
  • (2003)

Study on a MEMS silicon-based non-silicon mirror for an optical switch

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Abstract

A micro-electro-mechanical system (MEMS) silicon-based non-silicon mirror for a 2D optical switch is designed, fabricated and measured. The result shows that the mirror has good reflective performance. And driven by static electricity, it can rotate more than 10°at voltage less than 15 V. This kind of novel mirror will have good potential applications for MEMS optical switches.

© 2005 Chinese Optics Letters

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