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Chinese Optics Letters

Chinese Optics Letters


  • Vol. 1, Iss. 9 — Sep. 20, 2003
  • pp: 527–528

SOI thermo-optic modulator with fast response

Xiaolong Wang, Jingwei Liu, Qingfeng Yan, Shaowu Chen, and Jinzhong Yu  »View Author Affiliations

Chinese Optics Letters, Vol. 1, Issue 9, pp. 527-528 (2003)

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Silicon-on-insulator (SOI) technology offers tremendous potential for integration of optoelectronic functions on a silicon wafer. In this letter, a 1 × 1 multimode interference (MMI) Mach-Zender interferometer (MZI) thermo-optic modulator fabricated by wet-etching method is demonstrated. The modulator has an extinction ratio of -11.0 dB, extra loss of -4.9 dB and power consumption of 420 mW. The response time is less than 30 ?s.

© 2005 Chinese Optics Letters

OCIS Codes
(230.0250) Optical devices : Optoelectronics
(230.3120) Optical devices : Integrated optics devices

Xiaolong Wang, Jingwei Liu, Qingfeng Yan, Shaowu Chen, and Jinzhong Yu, "SOI thermo-optic modulator with fast response," Chin. Opt. Lett. 1, 527-528 (2003)

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