A prototype 1.55-?m Si-based micro-opto-electro-mechanical-systems (MOEMS) tunable filter is fabricated, employing surface micromachining technology. Full-width-at-half-maximum (FWHM) of the transmission spectrum is 23 nm. The tuning range is 30 nm under 50-V applied voltage. The device can be readily integrated with resonant cavity enhanced (RCE) detector and vertical cavity surface emitting laser (VCSEL) to fabricate tunable active devices.
© 2005 Chinese Optics Letters
Yuhua Zuo, Changjun Huang, Buwen Cheng, Xiao Cai, Rongwei Mao, Chuanbo Li, Liping Luo, Junhua Gao, Yunxia Bai, Lei Jiang, Chaohua Ma, Jialian Zhu, Liangchen Wang, Jinzhong Yu, and Qiming Wang, "1.55-?m Si-based MOEMS optical tunable filter," Chin. Opt. Lett. 1, 529-531 (2003)