Fabrication details of air-bridged Kerr nonlinear polymer photonic crystal slab structures are presented. Both the two-dimensional photonic crystal slab and the one-dimensional nanobeam structures are fabricated using direct focused ion beam etching and subsequent wet chemical etching. The scanning electron microscopy images show the uniformity and homogeneity of the cylindrical air holes. The optical measurement in the near-infrared region is implemented using the tapered fiber coupling method, and the results agree with the numerical calculations by using the three-dimensional finite-difference time-domain method.
© 2012 Chinese Optics Letters
Optical Design and Fabrication
Ziming Meng, Xiaolan Zhong, Chen Wang, and Zhiyuan Li, "Fabrication of air-bridged Kerr nonlinear polymer photonic crystal slab structures in near-infrared region," Chin. Opt. Lett. 10, 112202-112202 (2012)