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Chinese Optics Letters

Chinese Optics Letters


  • Editor: Zhizhan Xu
  • Vol. 10, Iss. 7 — Jul. 1, 2012
  • pp: 071202–071202

Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement

Bofan Wang, Zhongliang Li, and Xiangzhao Wang  »View Author Affiliations

Chinese Optics Letters, Vol. 10, Issue 7, pp. 071202-071202 (2012)

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A two-wavelength sinusoidal phase-modulating (SPM) laser diode (LD) interferometer for nanometer accuracy measurement is proposed. To eliminate the error caused by the intensity modulation, the SPM depth of the interference signal is chosen appropriately by varying the amplitude of the modulation current periodically. Then, the refine theory is induced to the measurement, and the two-wavelength interferometer (TWI) is combined with the single-wavelength LD interferometric technique to realize static displacement measurement with nanometer accuracy. Experimental results indicate that a static displacement measurement accuracy of 5 nm can be achieved over a range of 200 \mu m.

© 2012 Chinese Optics Letters

OCIS Codes
(070.6020) Fourier optics and signal processing : Continuous optical signal processing
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(350.2460) Other areas of optics : Filters, interference

ToC Category:
Instrumentation, Measurement, and Metrology

Bofan Wang, Zhongliang Li, and Xiangzhao Wang, "Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement," Chin. Opt. Lett. 10, 071202-071202 (2012)

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