OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters


  • Editor: Zhizhan Xu
  • Vol. 10, Iss. 9 — Sep. 1, 2012
  • pp: 090501–090501

Fabrication and characterization of sliced multilayer transmission grating for X-ray region

Qiushi Huang, Haochuan Li, Jingtao Zhu, Xiaoqiang Wang, Zhanshan Wang, Lingyan Chen, and Yongjian Tang  »View Author Affiliations

Chinese Optics Letters, Vol. 10, Issue 9, pp. 090501-090501 (2012)

View Full Text Article

Acrobat PDF (336 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

  • Export Citation/Save Click for help


To develop high quality dispersion optics in the X-ray region, the sliced multilayer transmission grating is examined. Dynamical diffraction theory is used to calculate the diffraction property of this volume grating. A WSi2/Si multilayer with a d-spacing of 14.3 nm and bi-layer number of 300 is deposited on a superpolished silicon substrate by direct current magnetron sputtering technology. To make the transmission grating, the multilayer is sliced and thinned in the cross-section direction to a depth of 23-25 μm. The diffraction efficiency of the grating is measured at E = 8.05 keV, and the 1st-order efficiency is 19%. The sliced multilayer grating with large aspect ratio and nanometer period can be used for high efficiency and high dispersion optics in the X-ray region.

© 2012 Chinese Optics Letters

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(310.1860) Thin films : Deposition and fabrication
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
Diffraction and Gratings

Qiushi Huang, Haochuan Li, Jingtao Zhu, Xiaoqiang Wang, Zhanshan Wang, Lingyan Chen, and Yongjian Tang, "Fabrication and characterization of sliced multilayer transmission grating for X-ray region," Chin. Opt. Lett. 10, 090501-090501 (2012)

Sort:  Author  |  Year  |  Journal  |  Reset


  1. Y. Platonov, V. Martynov, A. Kazimirov, and B. Lai, Proc. SPIE 5537, 161 (2004).
  2. C. Liu, R. Conley, A. T. Macrander, J. Maser, H. C. Kang, M. A. Zurbuchen, and G. B. Stephenson, J. Appl. Phys. 98, 113519 (2005).
  3. E. Spiller, Appl. Opt. 15, 2333 (1976).
  4. V. V. Martynov and Yu. Platonov, Rev. Sci. Instrum. 73, 1551 (2002).
  5. M. L. Schattenburg, R. J. Aucoin, R. C. Fleming, I. Plotnik, J. Porter, and H. I. Smith, Proc. SPIE 2280, 181 (1994).
  6. D. L. Voronov, R. Cambiea, R. M. Feshchenkoc, E. M. Gulliksona, H. A. Padmorea, A. V. Vinogradovc, and V. V. Yashchuk, Proc. SPIE 6705, 67050E (2007).
  7. L. Solymar and D. J. Cooke, Volume Holography and Volume Gratings (Academic Press, New York, 1981).
  8. A. V. Vinogradov, Proc. SPIE 2515, 22 (1995).
  9. H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, J. Maser, S. Bajt, and H. N. Chapman, Appl. Phys. Lett. 86, 151109 (2005).
  10. E. A. Bugaev, R. M. Feshchenko, A. V. Vinogradov, D. L. Voronov, V. A. Tokarev, and V. P. Petukhov, Proc. SPIE 5918, 591817 (2005).
  11. J. Maser and G. Schmahl, Opt. Commun. 89, 355 (1992).
  12. V. E. Levashov and A. V. Vinogradov, Appl. Opt. 32, 1130 (1993).
  13. G. Schneider, Appl. Phys. Lett. 71, 2242 (1997).
  14. Q. Huang, H. Li, J. Zhu, T. Sang, Z. Wang, and L. Chen, Acta Photon. Sin. (in Chinese) 38, 2299 (2009).
  15. Q. Huang, H. Li, J. Zhu, X. Wang, L. Jiang, Z. Wang, and Y. Tang, High Power Laser Part. Beams (in Chinese) 23, 1659 (2011).
  16. C. Liu, R. Conley, and A. T. Macrander, Proc. SPIE 6317, 63170J (2006).
  17. Y. Wang, H. Zhou, L. Zhou, R. L. Headrick, A. T. Macrander, and A. S. Ozcan, J. Appl. Phys. 101, 023503 (2007).
  18. M. Tan, H. Li, Q. Huang, H. Zhou, T. Huo, X. Wang, and J. Zhu, Chin. Opt. Lett. 9, 023102 (2011).
  19. Q. Huang, J. Zhu, H. Li, Z. Shen, X. Wang, Z. Wang, and Y. Tang, Chin. Opt. Lett. 10, 013103 (2012).
  20. V. Holy, U. Pietsch, and T. Baumbach, High-resolution X-ray Scattering from Thin Films and Multilayers (Springer, Berlin, 1999).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited