Surface-plasmon (SP) enhancement of amorphous-silicon-nitride (a-SiN<sub>x</sub>) light emission with single-layer gold (Au) waveguides is experimentally demonstrated through time-resolved photoluminescence measurement. The a-SiN<sub>x</sub> active layer with strong steady-state photoluminescence at 560 nm is prepared by plasma-enhanced chemical vapor deposition, and the Au waveguide on the top of the a-SiN<sub>x</sub> layer is fabricated by magnetron sputtering. The maximum Purcell factor value of ~3 is achieved with identified SP resonance of the Au waveguide at ~530 nm.
© 2013 Chinese Optics Letters
Keyong Chen, Xue Feng, and Yidong Huang, "Surface plasmon-enhanced amorphous-silicon-nitride light emission with single-layer gold waveguides," Chin. Opt. Lett. 11, 022401- (2013)