Surface plasmon-enhanced amorphous-silicon-nitride light emission with single-layer gold waveguides
Chinese Optics Letters, Vol. 11, Issue 2, pp. 022401- (2013)
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Abstract
Surface-plasmon (SP) enhancement of amorphous-silicon-nitride (a-SiNx) light emission with single-layer gold (Au) waveguides is experimentally demonstrated through time-resolved photoluminescence measurement. The a-SiNx active layer with strong steady-state photoluminescence at 560 nm is prepared by plasma-enhanced chemical vapor deposition, and the Au waveguide on the top of the a-SiNx layer is fabricated by magnetron sputtering. The maximum Purcell factor value of ~3 is achieved with identified SP resonance of the Au waveguide at ~530 nm.
© 2013 Chinese Optics Letters
OCIS Codes
(240.0240) Optics at surfaces : Optics at surfaces
(240.6680) Optics at surfaces : Surface plasmons
Citation
Keyong Chen, Xue Feng, and Yidong Huang, "Surface plasmon-enhanced amorphous-silicon-nitride light emission with single-layer gold
waveguides," Chin. Opt. Lett. 11, 022401- (2013)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-11-2-022401
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