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Chinese Optics Letters

Chinese Optics Letters


  • Editor: Zhizhan Xu
  • Vol. 11, Iss. 3 — Mar. 1, 2013
  • pp: 033101–

Microstructuring of anti-reflection f ilm for HgCdTe/Si IRFPA with femtosecond laser pulse

Shan Zhang, Xiaoning Hu, Yang Liao, Fei He, Changning Liu, and Ya Cheng  »View Author Affiliations

Chinese Optics Letters, Vol. 11, Issue 3, pp. 033101- (2013)

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A systematic series of silicon (Si) wafer with microstructured anti-reflection film is prepared by femtosecond laser pulse. The dependence of the morphology and optical properties of the microstructured Si on the experimental parameters is thoroughly investigated. With the laser pulse duration of 40 fs, central wavelength of 800 nm, repetition rate of 250 kHz, laser pulse power of 300 mW, 250 μm/s scanning speed, and 2 μm of displacement between the parallel scans in the air, the quasiordered arrays of grain microstructures on the Si wafer up to 800-nm tall and 800-nm diameter at the bottom offered near-unity transmission in the mid-infrared wavelength. An anti-reflection film of approximately 3 × 3 (mm) is developed on the (211) Si substrate with the optimized parameters, Moreover, up to 30% improvement of the response performance is demonstrated.

© 2013 Chinese Optics Letters

OCIS Codes
(310.0310) Thin films : Thin films
(310.1210) Thin films : Antireflection coatings
(320.7160) Ultrafast optics : Ultrafast technology
(310.6628) Thin films : Subwavelength structures, nanostructures

ToC Category:
Thin Films

Shan Zhang, Xiaoning Hu, Yang Liao, Fei He, Changning Liu, and Ya Cheng, "Microstructuring of anti-reflection f ilm for HgCdTe/Si IRFPA with femtosecond laser pulse," Chin. Opt. Lett. 11, 033101- (2013)

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  1. A. Rogalski, J. Antoszewski, and L. Faraone, J. Appl. Phys. 105, 091101 (2009)
  2. S. M. Johnson, W. A. Radford, A. A. Buell, M. F. Vilela, J. M. Peterson, J. J. Franklin, R. E. Bornfreund, A. C. Childs, G. M. Venzor, M. D. Newton, E. P. G. Smith, L. M. Ruzicka, G. K. Pierce, D. D. Lofgreen, T. J. de Lyon, and J. E. Jensen, Proc. SPIE 5732, 250 (2005).
  3. N. K. Dhar and M. Z. Tidrow, Proc. SPIE 5564, 34 (2004).
  4. R. K. Willardson and A. C. Beer, Semiconductors and Semimetals (Academic, New York, 1981).
  5. D. S. Hobbs and B. D. MacLeod, Proc. SPIE 6720, 67200L (2007).
  6. B. D. MacLeod and D. S. Hobbs, Proc. SPIE 6940, 69400Y (2008).
  7. J. Zhao, A. Wang, and M. A. Green, Appl. Phys. Lett. 73, 1991 (1998).
  8. Y. Lin, M. H. Hong, T. C. Chong, C. S. Lim, G. X. Chen, L. S. Tan, Z. B. Wang, and L. P. Shi, Appl. Phys. Lett. 89, 041108 (2006).
  9. M. L. Tseng, Y. W. Huang, M. K. Hsiao, H. W. Huang, H. M. Chen, Y. L. Chen, C. H. Chu, N. N. Chu, Y. J. He, C. M. Chang, W. C. Lin, D. W. Huang, H. P. Chiang, R. S. Liu, G. Sun, and D. P. Tsai, ACS Nano 6, 5190 (2012).
  10. Y. Peng, Y. Wen, D. Zhang, S. Luo, L. Chen, and Y. Zhu, Appl. Opt. 50, 4765 (2011).
  11. C. H. Crouch, J. E. Carey, M. Shen, E. Mazur, and F. Y. Genin, Appl. Phys. A 79, 1635 (2004) .
  12. T. Matsumura, A. Kazama, and T. Yagi, Appl. Phys. A 81, 1393 (2005).
  13. Y. Liu, "The optical properties of the microstructured silicon made by femtosecond laser (in Chinese)", Master Thesis (Fudan University, 2007).

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