Theoretical simulation and experiments based on a prism beam expander and an echelle grating are conducted to study the dependence of linewidth and pulse energy on incidence angle and slit width. With a larger prism incident angle or narrower slit width, the linewidth becomes narrower while the laser pulse energy becomes lower. However, the pulse energy can be improved by optimally designing the prism beam expander. In addition, a subpicometer linewidth ArF laser is obtained with a double-prism beam expander and an echelle grating.
© 2013 Chinese Optics Letters
(140.2180) Lasers and laser optics : Excimer lasers
(220.2740) Optical design and fabrication : Geometric optical design
(230.5480) Optical devices : Prisms
(300.3700) Spectroscopy : Linewidth
Lasers and Laser Optics
Haibo Zhang, Zhijun Yuan, Jun Zhou, Yunrong Wei, and Qihong Lou, "Effects of prism beam expander and slits on excimer laser linewidth narrowing module," Chin. Opt. Lett. 11, 041405- (2013)