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Chinese Optics Letters

Chinese Optics Letters


  • Editor: Zhizhan Xu
  • Vol. 11, Iss. 4 — Apr. 1, 2013
  • pp: 041405–

Effects of prism beam expander and slits on excimer laser linewidth narrowing module

Haibo Zhang, Zhijun Yuan, Jun Zhou, Yunrong Wei, and Qihong Lou  »View Author Affiliations

Chinese Optics Letters, Vol. 11, Issue 4, pp. 041405- (2013)

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Theoretical simulation and experiments based on a prism beam expander and an echelle grating are conducted to study the dependence of linewidth and pulse energy on incidence angle and slit width. With a larger prism incident angle or narrower slit width, the linewidth becomes narrower while the laser pulse energy becomes lower. However, the pulse energy can be improved by optimally designing the prism beam expander. In addition, a subpicometer linewidth ArF laser is obtained with a double-prism beam expander and an echelle grating.

© 2013 Chinese Optics Letters

OCIS Codes
(140.2180) Lasers and laser optics : Excimer lasers
(220.2740) Optical design and fabrication : Geometric optical design
(230.5480) Optical devices : Prisms
(300.3700) Spectroscopy : Linewidth

ToC Category:
Lasers and Laser Optics

Haibo Zhang, Zhijun Yuan, Jun Zhou, Yunrong Wei, and Qihong Lou, "Effects of prism beam expander and slits on excimer laser linewidth narrowing module," Chin. Opt. Lett. 11, 041405- (2013)

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