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Chinese Optics Letters

Chinese Optics Letters


  • Editor: Zhizhan Xu
  • Vol. 11, Iss. 5 — May. 1, 2013
  • pp: 053003–

Experimental study of Fourier transform spectrometer based on MEMS micro-mirror

Jianjun Chen, Yong Zhu, Bo Liu, Wei Wei, Ning Wang, and Jie Zhang  »View Author Affiliations

Chinese Optics Letters, Vol. 11, Issue 5, pp. 053003- (2013)

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We propose a new Fourier transform spectrometer based on programmable microelectromechanical systems (MEMS) micro-mirror and an improved Michelson interferometer. The principle of the spectrometer is theoretically analyzed. A signal acquisition unit and an experimental set-up are designed. The spectrum of the polychromatic light source is obtained at a slantwise reflector angle of 0.238°. The spectrum is analyzed by this system within the near infrared. The experimental results show that the spectral accuracy is less than 3 nm, and the signal-to-noise ratio (SNR) is 18 dB. The spectral resolution is less than 16 nm.

© 2013 Chinese Optics Letters

OCIS Codes
(300.0300) Spectroscopy : Spectroscopy
(300.6190) Spectroscopy : Spectrometers
(300.6300) Spectroscopy : Spectroscopy, Fourier transforms

ToC Category:

Jianjun Chen, Yong Zhu, Bo Liu, Wei Wei, Ning Wang, and Jie Zhang, "Experimental study of Fourier transform spectrometer based on MEMS micro-mirror," Chin. Opt. Lett. 11, 053003- (2013)

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