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Chinese Optics Letters

Chinese Optics Letters


  • Editor: Zhizhan Xu
  • Vol. 11, Iss. 6 — Jun. 1, 2013
  • pp: 062301–

Two-dimensional microscanner for laser projection

Yaobo Liu, Weizheng Yuan, Dayong Qiao, Longfei Shi, and Xiangnan Guo

Chinese Optics Letters, Vol. 11, Issue 6, pp. 062301- (2013)

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The design of a two-dimensional (2D) microscanner actuated electrostatically is presented, and a silicon-oninsulator (SOI) micromachining process is utilized to fabricate the sample. The microscanner can oscillate at inherent frequencies of 1146 and 360 Hz around two rotational axes, generating maximum twisting angles of ±10° and ±5.3° under two 10-V square waves, respectively. A monochromatic laser projection system based on Lissajous pattern is demonstrated using the developed microscanner, revealing an image resolution of 168 × 56 at 20 frames per second.

© 2013 Chinese Optics Letters

OCIS Codes
(110.0110) Imaging systems : Imaging systems
(230.0230) Optical devices : Optical devices
(330.0330) Vision, color, and visual optics : Vision, color, and visual optics

ToC Category:
Optical Devices

Yaobo Liu, Weizheng Yuan, Dayong Qiao, Longfei Shi, and Xiangnan Guo, "Two-dimensional microscanner for laser projection," Chin. Opt. Lett. 11, 062301- (2013)

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  1. J. Tsai, S. Huang, D. Hah, and M. C. Wu, J. Lightwave Technol. 24, 897 (2006).
  2. D. T. Neilson, R. Frahm, P. Kolodner, C. A. Bolle, R. Ryf, J. Kim, A. R. Papazian, C. J. Nuzman, A. Gasparyan, N. R. Basavanhally, V. A. Aksyuk, and J. V. Gates, J. Lightwave Technol. 22, 1499 (2004).
  3. C. Chong, K. Isamoto, and H. Toshiyoshi, IEEE Photon. Technol. Lett. 18, 133 (2006).
  4. A. D. Aguirre, P. R. Herz, Y. Chen, J. G. Fujimoto, W. Piyawattanametha, L. Fan, and M. C. Wu, Opt. Express. 15, 2445 (2007).
  5. T. Xie, H. Xie, G. K. Fedder, and Y. Pan, Appl. Opt. 42, 6422 (2003).
  6. A. D. Yalcinkaya, O. Ergeneman, and H. Urey, Sens. Actuators A Phys. 135, 236 (2007).
  7. A. D. Yalcinkaya, H. Urey, D. Brown, T. Montague, and R. Sprague, J. Microelectromech. Syst. 15, 786 (2006).
  8. Y. C. Ko, J. W. Cho, Y. K. Mun, H. G. Jeong, W. K. Choi, J. H. Lee, J. W. Kim, J. B. Yoo, and J. H. Lee, Sens. Actuators A Phys. 126, 218 (2006).
  9. K. H. Koh and C. Lee, J. Microelectromech. Syst. 21, 1124(2012).
  10. H. Schenk, P. D¨urr, T. Haase, D. Kunze, U. Sobe, H. Lakner, and H. Z¨uck, IEEE J. Select. Top. Quant. Electron. 6, 715 (2000).
  11. C. Lee, Sens. Actuators A Phys. 115, 581(2004).
  12. W. Piyawattanametha, P. R. Patterson, D. Hah, H. Toshiyoshi, and M. C. Wu, J. Microelectromech. Syst. 14, 1329 (2005).
  13. C. H. Ji, M. Choi, S. C. Kim, K. C. Song, J. U. Bu, and H. J. Nam, J. Microelectromech. Syst. 16, 989 (2007).
  14. K. H. Koh, T. Kobayashi, and C. Lee, Opt. Express 19, 13812 (2011).
  15. M. Scholles, A. Br¨auer, K. Frommhagena, C. Gerwiga, H. Lakner, H. Schenka, and M. Schwarzenberga, Proc. SPIE 6466, 64660A (2007).

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