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Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Editor: Zhizhan Xu
  • Vol. 11, Iss. 7 — Jul. 1, 2013
  • pp: 071201–

Determining polymer film thickness during manufacturing with broadband transmission

Chao Qiu, Xiaogang Sun, and Meisheng Luan  »View Author Affiliations


Chinese Optics Letters, Vol. 11, Issue 7, pp. 071201- (2013)


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Abstract

A novel broadband transmission method to determine polymer film thickness during manufacturing is proposed, and a measurement system is developed based on this method. The relationship between broadband optical power and film thickness is deduced according to the Lambert-Beer law. The system is composed of a halogen light and an optical power meter. Results show that the measurement error of this method is approximately 1 \mm m, and the resolution of the system is below 0.4 μm for polymer films with less than 100-μm thickness.

© 2013 Chinese Optics Letters

OCIS Codes
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.7000) Instrumentation, measurement, and metrology : Transmission
(160.4890) Materials : Organic materials

ToC Category:
Instrumentation, Measurement, and Metrology

Citation
Chao Qiu, Xiaogang Sun, and Meisheng Luan, "Determining polymer film thickness during manufacturing with broadband transmission," Chin. Opt. Lett. 11, 071201- (2013)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-11-7-071201


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References

  1. L. Campanella, R. Antiochia, R. Dragone, and I. Lavagnini, Intern. J. Environ. Anal. Chem. 85, 959 (2005).
  2. D. L. Gin, J. E. Bara, R. D. Noble, and B. J. Elliott, Macromol. Rapid Commun. 29, 367 (2008).
  3. A. Das, R. Dost, T. Richardson, M. Grell, J. J. Morrison, and M. L. Turner, Adv. Mater. 19, 4018 (2007).
  4. H. Song and C. Wu, Chin. Opt. Lett. 5, 712 (2007).
  5. J. Gu, C. Wang, Z. Tian, F. Liu, X. Zhang, J. Han, M. He, Q. Xing, W. Zhang, L. Chai, and Q. Wang, Chin. Opt. Lett. 9, S10404 (2011).
  6. X. Hong, Y. Gan, and Y. Wang, Surf. Interface Anal. 43, 1299 (2011).
  7. L. Magali, H. P. Tuulikki, S. Christine, R. Markku, and V. Heikki, Eur. J. Pharm. Sci. 21, 493 (2004).
  8. J. Dong and R. Lu, Appl. Opt. 51, 5668 (2012).
  9. J. W. You, S. Kim, and D. Kim, Opt. Express 16, 21022 (2008).
  10. C. B. Walsh and E. I. Franses, Thin Solid Films 347, 167 (1999).
  11. J. C. Grunlan, A. R. Mehrabi, and T. Ly, Meas. Sci. Technol. 16, 153 (2005).
  12. Y. Shirakawa, Appl. Radiat. Isotopes 53, 581 (2000).
  13. L. Guo, Y. Fan, G. Zhang, and K. Chen, Proc. SPIE 6834, 30 (2007).
  14. F. Tojo, S. Hirakawa, T. Toyoda, and M. Itoh, IEEE Sensors J. 6, 1309 (2006).
  15. D. Bikiaris, I. Koutri, D. Alexiadis, A. Damtsios, and G. Karagiannis, Int. J. Pharm. 438, 33 (2012).
  16. J. Johnson and T. Harris, Appl. Opt. 49, 2920 (2010).
  17. J. Im, S. K. Sengupta, and J. E. Whitten, Rev. Sci. Instrum. 81, 034103 (2010).
  18. Y. Xu, N. B. Jones, J. C. Fothergill, and C. D. Hanning, Opt. Laser Eng. 36, 607 (2001).
  19. C. Gray, C. B. Rogers, V. P. Manno, and R. D. White, Exp. Fluids 51, 281 (2011).
  20. C. H. Hidrovo and D. P. Hart, Meas. Sci. Technol. 12, 467 (2001).
  21. C. Qiu and X. Sun, Spectrosc. Spect. Anal. (in Chinese) 33, 163 (2013).

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