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Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Editor: Zhizhan Xu
  • Vol. 11, Iss. 7 — Jul. 1, 2013
  • pp: 071201–

Determining polymer film thickness during manufacturing with broadband transmission

Chao Qiu, Xiaogang Sun, and Meisheng Luan  »View Author Affiliations


Chinese Optics Letters, Vol. 11, Issue 7, pp. 071201- (2013)


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Abstract

A novel broadband transmission method to determine polymer film thickness during manufacturing is proposed, and a measurement system is developed based on this method. The relationship between broadband optical power and film thickness is deduced according to the Lambert-Beer law. The system is composed of a halogen light and an optical power meter. Results show that the measurement error of this method is approximately 1 \mm m, and the resolution of the system is below 0.4 μm for polymer films with less than 100-μm thickness.

© 2013 Chinese Optics Letters

OCIS Codes
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.7000) Instrumentation, measurement, and metrology : Transmission
(160.4890) Materials : Organic materials

ToC Category:
Instrumentation, Measurement, and Metrology

Citation
Chao Qiu, Xiaogang Sun, and Meisheng Luan, "Determining polymer film thickness during manufacturing with broadband transmission," Chin. Opt. Lett. 11, 071201- (2013)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-11-7-071201

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