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Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Editor: Zhizhan Xu
  • Vol. 11, Iss. 9 — Sep. 1, 2013
  • pp: 091202–

Fast and accurate measurement of large optical surfaces before polishing using a laser tracker

Jie Li and Shibin Wu

Chinese Optics Letters, Vol. 11, Issue 9, pp. 091202- (2013)


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Abstract

We present a method that accurately measures large optical surfaces before polishing using a laser tracker. Using the scanning mode of the laser tracker considerably improves measurement efficiency and minimizes the dominant errors caused by environmental change. We use this method to measure a \Phi 1.3-m aspheric mirror and obtain a measurement uncertainty of 0.72 \mu m (root mean square, RMS).

© 2013 Chinese Optics Letters

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

Citation
Jie Li and Shibin Wu, "Fast and accurate measurement of large optical surfaces before polishing using a laser tracker," Chin. Opt. Lett. 11, 091202- (2013)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-11-9-091202


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