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Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Editor: Zhizhan Xu
  • Vol. 12, Iss. 5 — May. 1, 2014
  • pp: 053101–

Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system

Jian Sun, Weili Zhang, Kui Yi, and Jianda Shao  »View Author Affiliations


Chinese Optics Letters, Vol. 12, Issue 5, pp. 053101- (2014)


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Abstract

A model is developed to improve thickness uniformity of coatings on spherical substrates rapidly and automatically using fixed shadow masks in a planetary rotation system. The coating thickness is accurately represented by a function composed of basic thickness, self-shadow effect, and shadow mask function. A type of mask with parabolic contours is proposed, and the thickness uniformity of coatings on spherical substrates can be improved in a large range of ratios of clear aperture (CA) to radius of curvature (RoC) by optimizing shadow masks using a numerical optimization algorithm. Theoretically, the thickness uniformity improves to more than 97.5% of CA/RoC from -1.9 to 1.9. Experimentally, the thickness uniformities of coatings on a convex spherical substrate (CA/RoC = 1.53) and on a concave spherical substrate (CA/RoC=-1.65) improve to be better than 98.5% after corrected by the shadow masks.

© 2014 Chinese Optics Letters

OCIS Codes
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.6805) Thin films : Theory and design

ToC Category:
Thin Films

Citation
Jian Sun, Weili Zhang, Kui Yi, and Jianda Shao, "Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system," Chin. Opt. Lett. 12, 053101- (2014)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-12-5-053101


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