We design and fabricate compact, low loss, and high port-count optical power splitters of 1 × 128 and2 × 128 using silica-based planar lightwave circuit (PLC) technology on 6 inch quartz substrate. PLC technology is mainly based on plasma enhanced chemical vapor deposition, photolithography, and etching. The measured results show that the insertion loss, uniformity, and wavelength-dependent loss of 1 × 128 and 2 × 128 optical power splitters are less than 23, 1.43, and 0.92 dB and 23.3, 1.8, and 1.3 dB, respectively, in the wavelength range from 1.26 to 1.65 mm. The polarization-dependent losses are less than 0.16 and 0.2 dB, respectively, in the wavelengths of 1.31, 1.49, and 1.55 mm.
© 2014 Chinese Optics Letters
Liangliang Wang, Junming An, Jiashun Zhang, Yuanda Wu, Jianguang Li, Hongjie Wang, Yue Wang, Pan Pan, Fei Zhong, Qiang Zha, Xiaojie Yin, Xiongwei Hu, and Degang Zhao, "Design and fabrication of optical power splitters with large port count," Chin. Opt. Lett. 12, 092302- (2014)