Abstract

A real-time monitoring system is set up based on a computer, dynamic interferometer, beam expanding system, and a beam reflecting system. The stability and repeatability of the monitoring system is verified. A workpiece and a glass monitoring plate are placed in the same ring. The surface figure of the workpiece, monitored by the monitoring plate, synchronizes with the surface of the glass monitoring plate in terms of peak–valley and power. The influence of the reflection and transmission surface are discussed in theory and a numeral deviation in online and offline testing data is quantitatively analyzed. The new method provides a quick and easy real-time method to characterize changes to the optical surface during polishing.

© 2015 Chinese Laser Press

Planar polishing process method based on real-time dressing of a polishing pad surface

Lingyu Zhao, Huiying Zhao, Hairong Wang, Mingjie Zhang, Ruiqing Xie, and Mingzhuang Zhang
Appl. Opt. 61(12) 3319-3327 (2022)

Technical Feasibility of Figuring Optical Surfaces by Ion Polishing

J. B. Schroeder, H. D. Dieselman, and J. W. Douglass
Appl. Opt. 10(2) 295-299 (1971)

Continuous monitoring of a surface slope by real-time shearing interferometry with a photorefractive crystal

Gilles Pauliat and Gérald Roosen
Appl. Opt. 45(5) 993-999 (2006)

In-process monitoring of grinding and polishing of optical surfaces

Robert-Jaap M. van der Bijl, Oliver W. Fähnle, Hedser van Brug, and Joseph J. M. Braat
Appl. Opt. 39(19) 3300-3303 (2000)

A deterministic optical figure correction technique that preserves precision-polished surface quality

John Arkwright, Jan Burke, and Mark Gross
Opt. Express 16(18) 13901-13907 (2008)