OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 2, Iss. 11 — Nov. 10, 2004
  • pp: 643–646

Design of LICVD equipment for preparation of nano powder and study on laser threshold

Yingcai Liu, Yansheng Yin, Jing Li, and Gui Wang  »View Author Affiliations


Chinese Optics Letters, Vol. 2, Issue 11, pp. 643-646 (2004)


View Full Text Article

Acrobat PDF (229 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

A laser-induced chemical vapor deposition (LICVD) nanometer equipment is designed and fabricated. The design conception of key parts is expatiated. The energy threshold of SiH4 decomposing is studied. In the condition of same reactive gas flux, the laser energy threshold decreases with the increase of SiH4 concentration. In the condition of same SiH4 concentration, with the increase of reactive gas flux, the laser energy threshold which induces SiH4 decomposition increases linearly at the beginning, and when the flux is more than 100 ml/min, it turns to increase slowly. The factors which influence the laser threshold are analyzed.

© 2005 Chinese Optics Letters

OCIS Codes
(040.6040) Detectors : Silicon
(130.3120) Integrated optics : Integrated optics devices
(140.3450) Lasers and laser optics : Laser-induced chemistry
(310.1860) Thin films : Deposition and fabrication

Citation
Yingcai Liu, Yansheng Yin, Jing Li, and Gui Wang, "Design of LICVD equipment for preparation of nano powder and study on laser threshold," Chin. Opt. Lett. 2, 643-646 (2004)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-2-11-643


Sort:  Journal  |  Reset

References

  1. H. Glerter, Prog. Mater. Sci.33, 223 (1989).
  2. H. Y. Zhang, A. X. Wei, S. H. Liu, W. Wang, D. Chen, L. Liang, and K. Chen, Thin Solid Films368, 315 (2000).
  3. S. Veprek, F.-A. Sarott, and Z. Iqbal, Phys. Rev. B36, 3344 (1987).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited