Research on film thickness of conductive line formed by laser micro-fine cladding and flexibly direct writing technique
Chinese Optics Letters, Vol. 2, Issue 11, pp. 654-657 (2004)
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Abstract
The conventional technology could not fulfill the rapidly growing need for fine conductive lines for its inherent limits. Therefore, in this study laser micro-fine cladding and flexibly direct writing technique is used to obtain conductive lines with high precision and reliability. In the case of different substrates and parameters, film thickness will be different. Film thickness directly influences the reliability and stability of conductive lines with exception of quality and running speed. Therefore, we focus on developing the optimal parameters for the different substrates to achieve expected film thickness and make conductive lines have good performance and quality.
© 2005 Chinese Optics Letters
OCIS Codes
(140.3510) Lasers and laser optics : Lasers, fiber
(310.1620) Thin films : Interference coatings
(350.3390) Other areas of optics : Laser materials processing
Citation
Huiling Li, Xiaoyan Zeng, Huifen Li, Xiangyou Li, and Yiqun Chen, "Research on film thickness of conductive line formed by laser micro-fine cladding and flexibly direct writing technique," Chin. Opt. Lett. 2, 654-657 (2004)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-2-11-654
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