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Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 2, Iss. 12 — Dec. 10, 2004
  • pp: 701–703

Non-contact thickness measurement for ultra-thin metal foils with differential white light interferometry

Yanli Du, Huimin Yan, Yong Wu, Xiaoqiang Yao, Yongjun Nie, and Baixuan Shi  »View Author Affiliations


Chinese Optics Letters, Vol. 2, Issue 12, pp. 701-703 (2004)


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Abstract

A new differential white light interference technique for the thickness measurements of metal foil is presented. In this work, the differential white light system consists of two Michelson interferometers in tandem, and the measured reflective surfaces are the corresponding surfaces of metal foil. Therefore, the measuring result is only relative to the thickness but not the position of metal foil. The method is non-contact and non-destructive, it has the advantages of high accuracy, fast detection, and compact structure. Theoretical analysis and preliminary experimental verifications have shown that the technique can be used to measure the thickness of foil in the range of 1 to 80 ?m with accuracy better than 0.08 ?m.

© 2005 Chinese Optics Letters

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing

Citation
Yanli Du, Huimin Yan, Yong Wu, Xiaoqiang Yao, Yongjun Nie, and Baixuan Shi, "Non-contact thickness measurement for ultra-thin metal foils with differential white light interferometry," Chin. Opt. Lett. 2, 701-703 (2004)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-2-12-701

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