OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 2, Iss. 12 — Dec. 10, 2004
  • pp: 704–707

Estimation of measuring uncertainty for optical micro-coordinate measuring machine

Kang Song and Zhuangde Jiang  »View Author Affiliations


Chinese Optics Letters, Vol. 2, Issue 12, pp. 704-707 (2004)


View Full Text Article

Acrobat PDF (254 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

Based on the evaluation principle of the measuring uncertainty of the traditional coordinate measuring machine (CMM), the analysis and evaluation of the measuring uncertainty for optical micro-CMM have been made. Optical micro-CMM is an integrated measuring system with optical, mechanical, and electronic components, which may influence the measuring uncertainty of the optical micro-CMM. If the influence of laser speckle is taken into account, its longitudinal measuring uncertainty is 2.0 ?m, otherwise it is 0.88 ?m. It is proved that the estimation of the synthetic uncertainty for optical micro-CMM is correct and reliable by measuring the standard reference materials and simulating the influence of the diameter of laser beam. With Heisenberg's uncertainty principle and quantum mechanics theory, a method for improving the measuring accuracy of optical micro-CMM through adding a diaphragm in the receiving terminal of the light path was proposed, and the measuring results are verified by experiments.

© 2005 Chinese Optics Letters

OCIS Codes
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(140.5960) Lasers and laser optics : Semiconductor lasers
(230.3120) Optical devices : Integrated optics devices

Citation
Kang Song and Zhuangde Jiang, "Estimation of measuring uncertainty for optical micro-coordinate measuring machine," Chin. Opt. Lett. 2, 704-707 (2004)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-2-12-704

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited