OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 2, Iss. 12 — Dec. 10, 2004
  • pp: 704–707

Estimation of measuring uncertainty for optical micro-coordinate measuring machine

Kang Song and Zhuangde Jiang  »View Author Affiliations


Chinese Optics Letters, Vol. 2, Issue 12, pp. 704-707 (2004)


View Full Text Article

Acrobat PDF (254 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

Based on the evaluation principle of the measuring uncertainty of the traditional coordinate measuring machine (CMM), the analysis and evaluation of the measuring uncertainty for optical micro-CMM have been made. Optical micro-CMM is an integrated measuring system with optical, mechanical, and electronic components, which may influence the measuring uncertainty of the optical micro-CMM. If the influence of laser speckle is taken into account, its longitudinal measuring uncertainty is 2.0 ?m, otherwise it is 0.88 ?m. It is proved that the estimation of the synthetic uncertainty for optical micro-CMM is correct and reliable by measuring the standard reference materials and simulating the influence of the diameter of laser beam. With Heisenberg's uncertainty principle and quantum mechanics theory, a method for improving the measuring accuracy of optical micro-CMM through adding a diaphragm in the receiving terminal of the light path was proposed, and the measuring results are verified by experiments.

© 2005 Chinese Optics Letters

OCIS Codes
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(140.5960) Lasers and laser optics : Semiconductor lasers
(230.3120) Optical devices : Integrated optics devices

Citation
Kang Song and Zhuangde Jiang, "Estimation of measuring uncertainty for optical micro-coordinate measuring machine," Chin. Opt. Lett. 2, 704-707 (2004)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-2-12-704


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. D. S. Wang, S. H. Li, and G. X. Zhang, Journal of Tianjin University (in Chinese) 32, 514 (1999).
  2. X. X. Fang and Z. G. Wang, Chin. J. Scientific Instrument (in Chinese) 23, 171 (2002).
  3. S. W. Lin and Z. T. Wu, Chin. Mechanical Eng. (in Chinese) 12, 1114 (2001).
  4. Y. T. Fei, X. H. Chen, and L. Qin, Error Theory and Data Processing (4th edition) (in Chinese) (China Machine Press, Beijing, 2001) p. 82, p. 93.
  5. S. W. Wang and B. H. Zhang, Journal of Shandong Institute of Building Materials (in Chinese) 10, 63 (1996).
  6. R. G. Dorsch, G. Hausler, and J. M. Herrmann, Appl. Opt. 33, 1306 (1994).
  7. J. H. Hao, J. L. Zhao, H. Y. Tan, and E. P. Li, Opt. Technol. (in Chinese) (2) 37 (1998).
  8. O. Falconi, J. Opt. Soc. Am. 54, 1315 (1964).
  9. W. S. Li, X. Y. Su, and J. T. Li, Chin. J. Lasers (in Chinese) 23, 1081 (1996).
  10. R. Baribeau and M. Rioux, Appl. Opt. 30, 2873 (1991).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited