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Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 2, Iss. 3 — Mar. 10, 2004
  • pp: 179–181

Optical properties of ZnO thin films on SiO2 substrates deposited by radio frequency magnetron sputtering

Deping Xiong, Xiqing Zhang, Jing Wang, Peng Lin, and Shihua Huang  »View Author Affiliations


Chinese Optics Letters, Vol. 2, Issue 3, pp. 179-181 (2004)


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Abstract

The optical properties of both the annealed and as-deposited ZnO thin films by radio frequency (RF) magnetron sputtering on SiO2 substrates were studied. In the annealed films, two pronounced well defined exciton absorption peaks for the A and B excitons were obtained in the absorption spectra, a strong free exciton emission without deep-level emissions was observed in the photoluminescence (PL) spectra at room temperature. It was found that annealing the films in oxygen dramatically improved the optical properties and the quality of the films.

© 2005 Chinese Optics Letters

OCIS Codes
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

Citation
Deping Xiong, Xiqing Zhang, Jing Wang, Peng Lin, and Shihua Huang, "Optical properties of ZnO thin films on SiO2 substrates deposited by radio frequency magnetron sputtering," Chin. Opt. Lett. 2, 179-181 (2004)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-2-3-179


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