OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 2, Iss. 9 — Sep. 10, 2005
  • pp: 541–542

Avoiding silicon/glass bonding damage with fusion bonding method

Daohong Yang, Chen Xu, and Guangdi Shen  »View Author Affiliations


Chinese Optics Letters, Vol. 2, Issue 9, pp. 541-542 (2005)


View Full Text Article

Acrobat PDF (389 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

A novel fusion bonding method between silicon and glass with Nd:YAG laser is described. This method overcomes the movable mechanical parts damage caused by the electrostatics force in micro-electronic machine-system (MEMS) device during the anodic bonding. The diameter of laser spot is 300 ?m, the power of laser is 100 W, the laser velocity for bonding is 0.05 m/s, the average bonding tension is 6.3 MPa. It could distinctly reduce and eliminate the defects and damage, especially in movable sensitive mechanical parts of MEMS device.

© 2005 Chinese Optics Letters

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(160.2750) Materials : Glass and other amorphous materials
(160.6000) Materials : Semiconductor materials
(220.4000) Optical design and fabrication : Microstructure fabrication

Citation
Daohong Yang, Chen Xu, and Guangdi Shen, "Avoiding silicon/glass bonding damage with fusion bonding method," Chin. Opt. Lett. 2, 541-542 (2005)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-2-9-541


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. T. Rogers and J. Kowal, Sensors and Actuators A 46, 113 (1995).
  2. E. T. Enikov and J. G. Boyd, International J. Engineering Science 38, 135 (2000).
  3. X. Chauffleur, G. Blasquez, and P. Pons, Sensors and Actuators A 46, 121 (1995).
  4. G. Blasquez and P. Favaro, Sensors and Actuators A 101, 156 (2002).
  5. J.-T. Huang and H.-A. Yang, Sensors and Actuators A 102, 1 (2002).
  6. U. M. Mescheder, M. Alavi, and K. Hiltmann, Sensors and Actuators A 97, 422 (2002).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited