Determination of the energy range is an important precondition of focus calibration using alignment procedure (FOCAL) test. A new method to determine the energy range of FOCAL off-lined is presented in this paper. Independent of the lithographic tool, the method is time-saving and effective. The influences of some process factors, e.g. resist thickness, post exposure bake (PEB) temperature, PEB time and development time, on the energy range of FOCAL are analyzed.
© 2005 Chinese Optics Letters
(050.0050) Diffraction and gratings : Diffraction and gratings
(100.2550) Image processing : Focal-plane-array image processors
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(230.0230) Optical devices : Optical devices
Dongqing Zhang, Xiangzhao Wang, and Weijie Shi, "A novel method to determine the FOCAL energy range," Chin. Opt. Lett. 3, 589-592 (2005)