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Chinese Optics Letters

Chinese Optics Letters


  • Vol. 3, Iss. 10 — Oct. 10, 2005
  • pp: 589–592

A novel method to determine the FOCAL energy range

Dongqing Zhang, Xiangzhao Wang, and Weijie Shi  »View Author Affiliations

Chinese Optics Letters, Vol. 3, Issue 10, pp. 589-592 (2005)

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Determination of the energy range is an important precondition of focus calibration using alignment procedure (FOCAL) test. A new method to determine the energy range of FOCAL off-lined is presented in this paper. Independent of the lithographic tool, the method is time-saving and effective. The influences of some process factors, e.g. resist thickness, post exposure bake (PEB) temperature, PEB time and development time, on the energy range of FOCAL are analyzed.

© 2005 Chinese Optics Letters

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(100.2550) Image processing : Focal-plane-array image processors
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(230.0230) Optical devices : Optical devices

Dongqing Zhang, Xiangzhao Wang, and Weijie Shi, "A novel method to determine the FOCAL energy range," Chin. Opt. Lett. 3, 589-592 (2005)

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