OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters


  • Vol. 3, Iss. 2 — Feb. 10, 2005
  • pp: 107–109

Near-field lithography on the azobenzene polymer liquid crystal films

Douguo Zhang, Pei Wang, Yonghua Lu, Ming Bai, Jun Yang, Lin Tang, Jiangying Zhang, Hai Ming, Qijin Zhang, Jian Liu, Zebo Zhang, Li Cao, and Anlian Pan  »View Author Affiliations

Chinese Optics Letters, Vol. 3, Issue 2, pp. 107-109 (2005)

View Full Text Article

Acrobat PDF (211 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

  • Export Citation/Save Click for help


In this article, we reported near-field research on azobenzene polymer liquid crystal films using scanning near-field optical microscopy (SNOM). Optical writing and subsequently topographic reading of the patterns with subwavelength resolution were carried out in our experiments. Nanometer scale dots and lines were successfully fabricated on the films and the smallest dot diameter is about 120 nm. The width of the line fabricated is about 250 nm. This method is also a choice for nanolithography. The mechanism of the surface deformation on the polymer films was briefly analyzed from the viewpoint of gradient force in the optical near field. The intensity distribution of the electric field near the tip aperture was numerically simulated using finite-difference time-domain (FDTD) method and the numerical simulation results were consistent with the experimental results.

© 2005 Chinese Optics Letters

OCIS Codes
(100.6640) Image processing : Superresolution
(180.5810) Microscopy : Scanning microscopy
(220.4610) Optical design and fabrication : Optical fabrication

Douguo Zhang, Pei Wang, Yonghua Lu, Ming Bai, Jun Yang, Lin Tang, Jiangying Zhang, Hai Ming, Qijin Zhang, Jian Liu, Zebo Zhang, Li Cao, and Anlian Pan, "Near-field lithography on the azobenzene polymer liquid crystal films," Chin. Opt. Lett. 3, 107-109 (2005)

Sort:  Author  |  Year  |  Journal  |  Reset


  1. N. Landraud, J. Peretti, F. Chaput, G. Lampel, J.-P. Boilot, K. Lahlil, and V. I. Safarov, Appl. Phys. Lett. 79, 4562 (2001).
  2. M. H. P. Moers, W. H. J. Kalle, A. G. T. Ruiter, J. C. A. G. Wiegant, A. K. Raap, J. Greve, B. G. DeGrooth, and N. F. Vanhulst, J. Microscopy-Oxford 182, 40 (1996).
  3. R. Riehn, A. Charas, J. Morgado, and F. Cacialli, Appl. Phys. Lett. 82, 526 (2003).
  4. P. C. Chaumet, A. Rahmani, and M. Nieto-Vesperinas, Phys. Rev. Lett. 88, 123601 (2002).
  5. E. Betzig and R. J. Chichester, Science 262, 1422 (1993).
  6. S. Y. Chou, P. R. Krauss, and P. J. Restorm, Appl. Phys. Lett. 67, 3114 (1995).
  7. Z. Yu, P. Deshpande, W. Wu, J. Wang, and S. Y. Chou, Appl. Phys. Lett. 77, 927 (2000).
  8. W. Wu, J. Gu, H. Ge, C. Keimel, and S. Y. Chou, Appl. Phys. Lett. 83, 2268 (2003).
  9. J.-Y. Zhang, H. Ming, P. Wang, X. H. Sun, Y. H. Lu, Y. X. Wu, J. P. Xie, Q. J. Zhang, J. Liu, A. F. Xie, Z. B. Zhang, and B. Y. Gu, Chin. Phys. Lett. 20, 1043 (2003).
  10. C. J. Barret, P. L. Rochon, and A. L. Natansohn, J. Chem. Phys. 109, 1505 (1998).
  11. S. Bian, J. M. Williams, D. Y. Kim, L. Li, S. Balasubramanian, J. Kumar, and S. Tripathy, J. Appl. Phys. 86, 4498 (1999).
  12. N. K. Viswanathan, D. Y. Kim, S. Bian, J. Williams, W. Liu, L. Li, L. Samuelson, J. Kumar, and S. K. Tripathy, J. Mater. Chem. 9, 1941 (1999).
  13. T. Ikawa, T. Mitsuoka, M. Hasegawa, M. Tsuchimori, O. Watanabe, and Y. Kawata, Phys. Rev. B 64, 195408 (2001).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited