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Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 3, Iss. 7 — Jul. 10, 2005
  • pp: 422–424

Design and fabrication of broad angular range depth-graded C/W multilayer mirror for hard X-ray optics

Zhong Zhang, Zhanshan Wang, Fengli Wang, Wenjuan Wu, Hongchang Wang, Shuji Qin, and Lingyan Chen  »View Author Affiliations


Chinese Optics Letters, Vol. 3, Issue 7, pp. 422-424 (2005)


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Abstract

In this paper, a depth-graded C/W multilayer mirror with broad grazing incident angular range, consisting of three multilayer stacks, each of which has different period thickness d and the layer pair number, was designed and fabricated by direct current (DC) magnetron sputtering. For calculating the definite performance of such a mirror, the saturation effects of the interfacial imperfection, such as interface roughness and diffusion, were emerged. The reflectivity of the mirror was measured by the X-ray diffraction (XRD) instrument at Cu K? radiation (? = 0.154 nm), the measured reflectivity was about 30% in a broad grazing incident angular range (0.55---0.85 deg.). By the fitting data, the thickness of each layer is almost same as the one designed and the roughness in the multilayer is about 0.85 nm, which is larger than the prospective value of 0.5 nm.

© 2005 Chinese Optics Letters

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(230.0230) Optical devices : Optical devices
(310.0310) Thin films : Thin films
(340.0340) X-ray optics : X-ray optics

Citation
Zhong Zhang, Zhanshan Wang, Fengli Wang, Wenjuan Wu, Hongchang Wang, Shuji Qin, and Lingyan Chen, "Design and fabrication of broad angular range depth-graded C/W multilayer mirror for hard X-ray optics," Chin. Opt. Lett. 3, 422-424 (2005)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-3-7-422


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References

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