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Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 4, Iss. 10 — Oct. 1, 2006
  • pp: 580–582

Scanned-cantilever atomic force microscope with large scanning range

Jintao Yang and Wendong Xu  »View Author Affiliations


Chinese Optics Letters, Vol. 4, Issue 10, pp. 580-582 (2006)


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Abstract

A scanned-cantilever atomic force microscope (AFM) with large scanning range is proposed, which adopts a new design named laser spot tracking. The scanned-cantilever AFM uses the separate flexure x-y scanner and z scanner instead of the conventional piezoelectric tube scanner. The closed-loop control and integrated capacitive sensors of these scanners can insure that the images of samples have excellent linearity and stability. According to the experimental results, the scanned-cantilever AFM can realize maximal 100*100 (micron) scanning range, and 1-nm resolution in z direction, which can meet the requirements of large scale sample testing.

© 2006 Chinese Optics Letters

OCIS Codes
(110.0180) Imaging systems : Microscopy
(180.0180) Microscopy : Microscopy
(180.5810) Microscopy : Scanning microscopy

Citation
Jintao Yang and Wendong Xu, "Scanned-cantilever atomic force microscope with large scanning range," Chin. Opt. Lett. 4, 580-582 (2006)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-4-10-580

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