OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters


  • Vol. 4, Iss. 10 — Oct. 1, 2006
  • pp: 580–582

Scanned-cantilever atomic force microscope with large scanning range

Jintao Yang and Wendong Xu  »View Author Affiliations

Chinese Optics Letters, Vol. 4, Issue 10, pp. 580-582 (2006)

View Full Text Article

Acrobat PDF (190 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

  • Export Citation/Save Click for help


A scanned-cantilever atomic force microscope (AFM) with large scanning range is proposed, which adopts a new design named laser spot tracking. The scanned-cantilever AFM uses the separate flexure x-y scanner and z scanner instead of the conventional piezoelectric tube scanner. The closed-loop control and integrated capacitive sensors of these scanners can insure that the images of samples have excellent linearity and stability. According to the experimental results, the scanned-cantilever AFM can realize maximal 100*100 (micron) scanning range, and 1-nm resolution in z direction, which can meet the requirements of large scale sample testing.

© 2006 Chinese Optics Letters

OCIS Codes
(110.0180) Imaging systems : Microscopy
(180.0180) Microscopy : Microscopy
(180.5810) Microscopy : Scanning microscopy

Jintao Yang and Wendong Xu, "Scanned-cantilever atomic force microscope with large scanning range," Chin. Opt. Lett. 4, 580-582 (2006)

Sort:  Author  |  Year  |  Journal  |  Reset


  1. G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).
  2. D. R. Baselt and J. D. Baldeschwieler, Rev. Sci. Instrum. 64, 908 (1993).
  3. B. G. de Grooth, C. A. Putman, K. O. van der Werf, N. F. van Hulst, G. van Oort, and J. Greve, Proc. SPIE 1639, 205 (1992).
  4. P. K. Hansma, B. Drake, D. Grigg, C. B. Prater, F. Yashar, G. Gurley, V. Elings, S. Feinstein, and R. Lal, J. Appl. Phys. 76, 796 (1994).
  5. D. Sarid, P. Pax, L. Yi, S. Howells, M. Gallagher, T. Chen, V. Elings, and D. Bocek, Rev. Sci. Instrum. 63, 3905 (1992).
  6. G. Meyer and N. M. Amer, Appl. Phys. Lett. 56, 2100 (1990).
  7. M. Hipp, H. Bielefeldt, J. Colchero, O. Marti, and J. Mlynek, Ultramicroscopy 42-44, 1498 (1992).
  8. C. B. Prater, J. Massie, D. A. Grigg, V. B. Elings, P. K. Hansma, and B. Drake, Scanning stylus atomic force microscope with cantilever tracking and optical access US Patent 5560244 (1996).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited