OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 4, Iss. 3 — Mar. 10, 2006
  • pp: 128–130

A piezoresistive micro-cantilever for thermal infrared detector

Jintao Liang, Junhua Liu, Xin Li, and Changchun Zhu  »View Author Affiliations


Chinese Optics Letters, Vol. 4, Issue 3, pp. 128-130 (2006)


View Full Text Article

Acrobat PDF (218 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

A novel tri-layer Si-based micro-cantilever thermal infrared (IR) detector with carbon nanotube (CNT) film is fabricated. It is based on the characteristic that the composite micro-cantilever bends in response to incident IR thermal radiation due to the bi-material effect. The bending of micro-cantilever is piezoresistively detected. Furthermore, a new IR absorbing layer material --- CNTs --- is coated in order to enhance IR radiation absorbing characteristic. the micro-electro-mechanical system (MEMS) sensor could be compatible with integrated circuit technology.

© 2005 Chinese Optics Letters

OCIS Codes
(040.0040) Detectors : Detectors
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(310.0310) Thin films : Thin films

Citation
Jintao Liang, Junhua Liu, Xin Li, and Changchun Zhu, "A piezoresistive micro-cantilever for thermal infrared detector," Chin. Opt. Lett. 4, 128-130 (2006)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-4-3-128


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. L. R. Senesac, J. L. Corbeil, S. Rajic, N. V. Lavrik, and P. G. Datskos, Ultramicroscopy 97, 451 (2003).
  2. J.-K. Kim and C.-H. Han, Sensors and Actuators A 89, 22 (2001).
  3. A. Vidic, D. Then, and Ch. Ziegler, Ultramicroscopy 97, 407 (2003).
  4. A. Rogalski, Infrared Phys. Technol. 43, 187 (2002).
  5. J. Yang, T. Ono, and M. Esashi, Sensors and Actuators A 82, 102 (2000).
  6. W. Fang, H.-C. Tsai, and C.-Y. Lo, Sensors and Actuators A 77, 21 (1999).
  7. H. Li, B. Huang, D. Yi, H. Cui, Y. He, and J. Peng, Chin. Opt. Lett. 2, 171 (2004).
  8. X. Chen, Z. Jing, S. Sun, and G. Xiao, Chin. Opt. Lett. 2, 694 (2004).
  9. H. Hu, Z. Jing, and S. Hu, Chin. Opt. Lett. 3, 322 (2004).
  10. O. Nakabeppu, M. Chandrachood, Y. Wu, J. Lai, and A. Majumdar, Appl. Phys. Lett. 66, 694 (1995).
  11. W. Lang, K. Kuhl, and H. Sandmaier, Sensors and Actuators A 34, 243 (1992).
  12. Y.-F. Liu, Z.-M. Shen, Y. Kiyoshi, B.-H. Ma, and J.-M. Yu, New Carbon Materials (in Chinese) 19, 197 (2004).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited