A piezoresistive micro-cantilever for thermal infrared detector
Chinese Optics Letters, Vol. 4, Issue 3, pp. 128-130 (2006)
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Abstract
A novel tri-layer Si-based micro-cantilever thermal infrared (IR) detector with carbon nanotube (CNT) film is fabricated. It is based on the characteristic that the composite micro-cantilever bends in response to incident IR thermal radiation due to the bi-material effect. The bending of micro-cantilever is piezoresistively detected. Furthermore, a new IR absorbing layer material --- CNTs --- is coated in order to enhance IR radiation absorbing characteristic. the micro-electro-mechanical system (MEMS) sensor could be compatible with integrated circuit technology.
© 2005 Chinese Optics Letters
OCIS Codes
(040.0040) Detectors : Detectors
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(310.0310) Thin films : Thin films
Citation
Jintao Liang, Junhua Liu, Xin Li, and Changchun Zhu, "A piezoresistive micro-cantilever for thermal infrared detector," Chin. Opt. Lett. 4, 128-130 (2006)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-4-3-128
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