OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 4, Iss. 4 — Apr. 1, 2006
  • pp: 247–248

ZrO2 films with variable refractive index by glancing angle deposition

Xiaoyong Fu, Sumei Wang, Degang Deng, Kui Yi, Jianda Shao, and Zhengxiu Fan  »View Author Affiliations


Chinese Optics Letters, Vol. 4, Issue 4, pp. 247-248 (2006)


View Full Text Article

Acrobat PDF (307 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

When optical film is deposited at oblique angle incidences, the film becomes porously, and the film effective refractive index will decrease. Six porous ZrO2 films are fabricated by the glancing angle deposition (GLAD) technique with the different incidence angles. By changing the substrate tilt angle from 0 to 85 degrees, the film refractive index varies from 1.92 to 1.27.

© 2005 Chinese Optics Letters

OCIS Codes
(240.0310) Optics at surfaces : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

Citation
Xiaoyong Fu, Sumei Wang, Degang Deng, Kui Yi, Jianda Shao, and Zhengxiu Fan, "ZrO2 films with variable refractive index by glancing angle deposition," Chin. Opt. Lett. 4, 247-248 (2006)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-4-4-247


Sort:  Journal  |  Reset

References

  1. I. M. Thomas, Appl. Opt. 31, 6145 (1992).
  2. K. Robbie, M. J. Brett, and A. Lakhtakia, Nature 384, 616 (1996).
  3. O. Toader and S. John, Science 292, 1133 (2001).
  4. S. R. Kennedy and M. J. Brett, Appl. Opt. 42, 4573 (2003).
  5. K. Kaminska and K. Robbie, Appl. Opt. 43, 1570 (2004).
  6. D. E. Aspnes, J. B. Theeten, and F. Hottier, Phys. Rev. B 20, 3292 (1979).
  7. J. Wang, J. Shao, and Z. Fan, Chin. Phys. Lett. 22, 223 (2005).
  8. H. A. Macleod, Thin-Film Optical Filters (Institute of Physics Publishing, London, 2001).
  9. Z. Shen, J. Shao, Y. Wang, and Z. Fan, Acta Phys. Sin. (in Chinese) 54, 3069 (2005).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article

OSA is a member of CrossRef.

CrossCheck Deposited