OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 4, Iss. 6 — Jun. 10, 2006
  • pp: 366–369

Optical properties and structures of silver thin films deposited by magnetron sputtering with different thicknesses

Xilian Sun, Ruijin Hong, Haihong Hou, Zhengxiu Fan, and Jianda Shao  »View Author Affiliations


Chinese Optics Letters, Vol. 4, Issue 6, pp. 366-369 (2006)


View Full Text Article

Acrobat PDF (375 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

A series of thin Ag films with different thicknesses grown under identical conditions are analyzed by means of spectrophotometer. From these measurements the values of refractive index and extinction coefficient are calculated. The films are deposited onto BK7 glass substrates by direct current (DC) magnetron sputtering. It is found that the optical properties of the Ag films can be affected by films thickness. Below critical thickness of 17 nm, which is the thickness at which Ag films form continuous films, the optical properties and constants vary significantly with thickness increasing and then tend to a stable value up to about 40 nm. At the same time, X-ray diffraction measurement is carried out to examine the microstructure evolution of Ag films as a function of films thickness. The relation between optical properties and microstructure is discussed.

© 2006 Chinese Optics Letters

OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(160.3900) Materials : Metals
(260.3910) Physical optics : Metal optics
(310.0310) Thin films : Thin films
(310.6860) Thin films : Thin films, optical properties

Citation
Xilian Sun, Ruijin Hong, Haihong Hou, Zhengxiu Fan, and Jianda Shao, "Optical properties and structures of silver thin films deposited by magnetron sputtering with different thicknesses," Chin. Opt. Lett. 4, 366-369 (2006)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-4-6-366

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited