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Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 4, Iss. 7 — Jul. 10, 2006
  • pp: 422–424

A novel hybrid surface micromachined segmented mirror for large aperture laser applications

Jie Li, Haiqing Chen, and Hongbin Yu  »View Author Affiliations


Chinese Optics Letters, Vol. 4, Issue 7, pp. 422-424 (2006)


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Abstract

A novel hybrid surface micromachined segmented mirror array is described. This device is capable of scaling to large apertures for correcting time-varying aberrations in laser applications. Each mirror is composed of bottom electrode, support part, and mirror plate, in which a T-shaped beam structure is used to support the mirror plate. It can provide mirror with vertical movement and rotation around two horizontal axes. The test results show that the maximum deflection along the vertical direction of the mirror plate is 2 microns, while the rotation angles around x and y axes are +-2.3 deg. and +-1.45 deg., respectively.

© 2006 Chinese Optics Letters

OCIS Codes
(040.6040) Detectors : Silicon
(140.0140) Lasers and laser optics : Lasers and laser optics
(230.0230) Optical devices : Optical devices
(310.0310) Thin films : Thin films

Citation
Jie Li, Haiqing Chen, and Hongbin Yu, "A novel hybrid surface micromachined segmented mirror for large aperture laser applications," Chin. Opt. Lett. 4, 422-424 (2006)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-4-7-422

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