OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters


  • Vol. 4, Iss. 7 — Jul. 10, 2006
  • pp: 422–424

A novel hybrid surface micromachined segmented mirror for large aperture laser applications

Jie Li, Haiqing Chen, and Hongbin Yu  »View Author Affiliations

Chinese Optics Letters, Vol. 4, Issue 7, pp. 422-424 (2006)

View Full Text Article

Acrobat PDF (199 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

  • Export Citation/Save Click for help


A novel hybrid surface micromachined segmented mirror array is described. This device is capable of scaling to large apertures for correcting time-varying aberrations in laser applications. Each mirror is composed of bottom electrode, support part, and mirror plate, in which a T-shaped beam structure is used to support the mirror plate. It can provide mirror with vertical movement and rotation around two horizontal axes. The test results show that the maximum deflection along the vertical direction of the mirror plate is 2 microns, while the rotation angles around x and y axes are +-2.3 deg. and +-1.45 deg., respectively.

© 2006 Chinese Optics Letters

OCIS Codes
(040.6040) Detectors : Silicon
(140.0140) Lasers and laser optics : Lasers and laser optics
(230.0230) Optical devices : Optical devices
(310.0310) Thin films : Thin films

Jie Li, Haiqing Chen, and Hongbin Yu, "A novel hybrid surface micromachined segmented mirror for large aperture laser applications," Chin. Opt. Lett. 4, 422-424 (2006)

Sort:  Author  |  Year  |  Journal  |  Reset


  1. J. D. Mansell, S. Sinha, and R. L. Byer, Proc. SPIE 4493, 1 (2002).
  2. G. Vdovin and P. M. Sarro, Appl. Opt. 34, 2968 (1995).
  3. L. M. Miller, M. L. Agronin, R. K. Bartman, W. J. Kaiser, T. W. Kenny, R. L. Norton, and E. C. Vote, Proc. SPIE 1945, 421 (1993).
  4. M. C. Roggeman, V. M. Bright, B. M. Welsh, S. R. Hick, P. C. Roberts, W. D. Cowan, and J. H. Comtois, Opt. Eng. 36, 1326 (1997).
  5. J.-C. Tsai and M. C. Wu, Journal of Microelectromechanical System 14, 1323 (2005).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited