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Chinese Optics Letters

Chinese Optics Letters


  • Vol. 4, Iss. 9 — Sep. 10, 2006
  • pp: 550–552

Determination of the deposition rate of DC magnetron sputtering in fabrication of X-ray supermirrors

Fengli Wang, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Wenjuan Wu, Shumin Zhang, and Lingyan Chen  »View Author Affiliations

Chinese Optics Letters, Vol. 4, Issue 9, pp. 550-552 (2006)

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X-ray supermirror is a non-periodic multilayer structure, whose optical performance is greatly affected by the stability and accuracy of the deposition rate in the fabrication using the direct current (DC) magnetron sputtering. By considering the location-setting time of the substrate positioning above the sputtering target, the deposition rate can be accurately determined. Experimental results show that the optical performance of the supermirror is in agreement with the design aim, which indicates that the layer thickness is well controlled and coincides with the desired ones.

© 2006 Chinese Optics Letters

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(230.0230) Optical devices : Optical devices
(310.0310) Thin films : Thin films
(340.0340) X-ray optics : X-ray optics

Fengli Wang, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Wenjuan Wu, Shumin Zhang, and Lingyan Chen, "Determination of the deposition rate of DC magnetron sputtering in fabrication of X-ray supermirrors," Chin. Opt. Lett. 4, 550-552 (2006)

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