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Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 5, Iss. 3 — Mar. 10, 2007
  • pp: 164–167

Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement

Guotian He, Xiangzhao Wang, Aijun Zeng, and Feng Tang  »View Author Affiliations


Chinese Optics Letters, Vol. 5, Issue 3, pp. 164-167 (2007)


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Abstract

A sinusoidal phase-modulating (SPM) laser diode (LD) interferometer for real-time surface profile measurement is proposed and its principle is analyzed. The phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit. For 60*60 measurement points of the surface profile, the measuring time is 10 ms. A root mean square (RMS) measurement repeatability of 3.93 nm is realized, and the measurement resolution reaches 0.19 nm.

© 2007 Chinese Optics Letters

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(220.4840) Optical design and fabrication : Testing
(230.5750) Optical devices : Resonators

Citation
Guotian He, Xiangzhao Wang, Aijun Zeng, and Feng Tang, "Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement," Chin. Opt. Lett. 5, 164-167 (2007)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-5-3-164

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