Abstract

In solid immersion lens (SIL) microscopy systems with high numerical aperture (NA), there always exists the aberration produced by Fresnel effects at the interface between SIL and the sample. This aberration may cause the degradation of the image of sample. We design a continuous phase filter and optimize the optical field distribution of SIL system. The numerical results show that when the continuous phase filter is used, the field distribution of SIL system can be optimized, and the focal depth and intensity of transmitted light can be increased. At the same time, the intensity of side-lobe and the resolution are kept almost unchanged.

© 2007 Chinese Optics Letters

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