Abstract

The optical property, structure, surface properties (roughness and defect density) and laser-induced damage threshold (LIDT) of TiO2 films deposited by electronic beam (EB) evaporation of TiO2 (rutile), TiO2 (anatase) and TiO2+Ta2O5 composite materials are comparatively studied. All films show the polycrystalline anatase TiO2 structure. The loose sintering state and phase transformation during evaporating TiO2 anatase slice lead to the high surface defect density, roughness and extinction coefficient, and low LIDT of films. The TiO2+Ta2O5 composite films have the lowest extinction coefficient and the highest LIDT among all samples investigated. Guidance of selecting materials for high LIDT laser mirrors is given.

© 2007 Chinese Optics Letters

TiO₂-Ta₂O₅ composite thin films deposited by radio frequency ion-beam sputtering

Cheng-Chung Lee and Chien-Jen Tang
Appl. Opt. 45(36) 9125-9131 (2006)

Laser-induced damage thresholds of bulk and coating optical materials at 1030  nm, 500  fs

Laurent Gallais and Mireille Commandré
Appl. Opt. 53(4) A186-A196 (2014)

Effects of annealing on the optical, structural, and chemical properties of TiO₂ and MgF₂ thin films prepared by plasma ion-assisted deposition

Seouk-Hoon Woo and Chang Kwon Hwangbo
Appl. Opt. 45(7) 1447-1455 (2006)

Reactive ion-assisted deposition of e-beam evaporated titanium for high refractive index TiO₂ layers and laser damage resistant, broad bandwidth, high-reflection coatings

John Bellum, Ella Field, Damon Kletecka, and Finis Long
Appl. Opt. 53(4) A205-A211 (2014)

Damage threshold influenced by the high absorption defect at the film–substrate interface under ultraviolet laser irradiation

Zhenkun Yu, Hongbo He, Wei Sun, Hongji Qi, Minghong Yang, Qiling Xiao, and Meiping Zhu
Opt. Lett. 38(21) 4308-4311 (2013)