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Chinese Optics Letters

Chinese Optics Letters


  • Vol. 6, Iss. 5 — May. 1, 2008
  • pp: 342–345

Study on an improved five-interferogram phase-shifting algorithm

Zhiyong Luo and Jialin Dai  »View Author Affiliations

Chinese Optics Letters, Vol. 6, Issue 5, pp. 342-345 (2008)

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Using traditional five-interferogram algorithm to unwrap phase for length measurement, the phase steps must be equal to π/2 exactly, but it is almost impossible to achieve in nanometer positioning technique. Aiming to overcome this defect of traditional five-interferogram algorithm, an improved five-interferogram algorithm is presented. This improved algorithm not only keeps the high accuracy of traditional five-interferogram algorithm, but also does not need absolute equal step to unwrap phase. Instead, this algorithm only needs measuring phase-shifting. With the numerical simulation, the improved five-interferogram algorithm shows high accuracy, high reliability, and feasibility in practice. It is very valuable for accurate length measurement with Fizeau interferometer and Fabry-Perot interferometer.

© 2008 Chinese Optics Letters

OCIS Codes
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology

Zhiyong Luo and Jialin Dai, "Study on an improved five-interferogram phase-shifting algorithm," Chin. Opt. Lett. 6, 342-345 (2008)

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