OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters


  • Vol. 6, Iss. 5 — May. 1, 2008
  • pp: 384–385

Intrinsic stress analysis of sputtered carbon film

Liqin Liu, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Moyan Tan, Qiushi Huang, Rui Chen, Jing Xu, and Lingyan Chen  »View Author Affiliations

Chinese Optics Letters, Vol. 6, Issue 5, pp. 384-385 (2008)

View Full Text Article

Acrobat PDF (322 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

  • Export Citation/Save Click for help


Intrinsic stresses of carbon films deposited by direct current (DC) magnetron sputtering were investigated. The bombardments of energetic particles during the growth of films were considered to be the main reason for compressive intrinsic stresses. The values of intrinsic stresses were determined by measuring the radius of curvature of substrates before and after film deposition. By varying argon pressure and target-substrate distance, energies of neutral carbon atoms impinging on the growing films were optimized to control the intrinsic stresses level. The stress evolution in carbon films as a function of film thickness was investigated and a void-related stress relief mechanism was proposed to interpret this evolution.

© 2008 Chinese Optics Letters

OCIS Codes
(230.4040) Optical devices : Mirrors
(310.6870) Thin films : Thin films, other properties

Liqin Liu, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Moyan Tan, Qiushi Huang, Rui Chen, Jing Xu, and Lingyan Chen, "Intrinsic stress analysis of sputtered carbon film," Chin. Opt. Lett. 6, 384-385 (2008)

Sort:  Author  |  Year  |  Journal  |  Reset


  1. S. Jacobi, B. Steeg, J. Wiesmann, M. Stormer, J. Feldhaus, R. Bormann, and C. Michaelsen, Proc. SPIE 4782, 113 (2002).
  2. http://www-cxro.lbl.gov/als6.3.2/.
  3. F. M. d'Heurle, Metall. Teans. 1, 725 (1970).
  4. F. M. d'Heurle and J. M. E. Harper, Thin Solid Films 171, 81 (1989).
  5. H. Windischmann, J. Appl. Phys. 62, 1800 (1987).
  6. C. A. Davis, Thin Solid Films 226, 30 (1993).
  7. E. Mounier and Y. Pauleau, J. Vac. Sci. Technol. A 14, 2535 (1996).
  8. F. Wang, Z. Wang, J. Zhu, Z. Zhang, W. Wu, S. Zhang, and L. Chen, Chin. Opt. Lett. 4, 550 (2006).
  9. Z. Wang, S. Zhang, W. Wu, J. Zhu, H. Wang, C. Li, Y. Xu, F. Wang, Z. Zhang, L. Chen, H. Zhou, and T. Huo, Chin. Opt. Lett. 4, 611 (2006).
  10. E. Mounier and Y. Pauleau, Diamond. Relat. Mater. 6, 1182 (1997).
  11. D. L. Windt, Computers in Physics 12, 360 (1998).
  12. D. Henderson, M. H. Brodsky, and P. Chaudhari, Appl. Phys. Lett. 25, 641 (1974).
  13. O. Durand-Drouhin and M. Benlahsen, Solid State Commun. 131, 425 (2004).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited