Interferometric optical testing using computer-generated hologram (CGH) can give highly accurate measurement of aspheric surfaces has been proved. After the system is designed, a phase function is obtained according to the CGH's surface plane. For the requirement of accuracy, an optimization algorithm that transfers the phase function into a certain mask pattern file is presented in this letter, based on the relationship between the pattern error of CGH and the output wavefront accuracy. Then the writing machine is able to fabricate such a mask with this kind of file. With that mask, an improved procedure on fabrication of phase type CGH is also presented. Interferometric test results of an aspheric surface show that the whole test system obtains the demanded accuracy.
© 2009 Chinese Optics Letters
(050.1970) Diffraction and gratings : Diffractive optics
(090.1760) Holography : Computer holography
(220.1250) Optical design and fabrication : Aspherics
(220.3620) Optical design and fabrication : Lens system design
Jun Ma, Zhishan Gao, Rihong Zhu, Yong He, Lei Chen, Jianxin Li, E. Y. B. Pun, W. H. Wong, Lihui Huang, Changqing Xie, Xiaoli Zhu, and Jie Ma, "Problems on fabrication of computer-generated holograms for testing aspheric surfaces," Chin. Opt. Lett. 7, 70-73 (2009)