OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 7, Iss. 10 — Oct. 1, 2009
  • pp: 967–970

Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition

Xiudi Xiao, Guoping Dong, Hongbo He, Hongji Qi, Zhengxiu Fan, and Jianda Shao  »View Author Affiliations


Chinese Optics Letters, Vol. 7, Issue 10, pp. 967-970 (2009)


View Full Text Article

Acrobat PDF (723 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

Tantalum pentoxide thin films are prepared by oblique angle electron beam evaporation. The influence of flux angle on the surface morphology and microstructure is investigated by scanning electron microscopy (SEM). The Ta2O5 thin films are anisotropic with highly orientated nanostructure of slanted columns. The porous microstructure of the as-deposited films results in the decrease of effective refractive index and packing density with increasing deposition angle. The anisotropic structure results in optical birefringence. The in-plane birefringence increases with the increase of deposition angle and reaches the maximum of 0.055 at the deposition angle of 70. Anisotropic microstructure and critical packing density are the two key factors to influence the in-plane birefringence.

© 2009 Chinese Optics Letters

OCIS Codes
(240.0240) Optics at surfaces : Optics at surfaces
(310.0310) Thin films : Thin films

Citation
Xiudi Xiao, Guoping Dong, Hongbo He, Hongji Qi, Zhengxiu Fan, and Jianda Shao, "Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition," Chin. Opt. Lett. 7, 967-970 (2009)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-7-10-967

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article

OSA is a member of CrossRef.

CrossCheck Deposited