We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properties that change rapidly in time than the temporal phase-shifting interferometry. However, it is more susceptible to the geometric errors since the positions at which interferograms are collected are different. In this letter, we propose a spatial phase-shifting interferometry with separate paths for object and reference waves. Also, the object wave estimate is parameterized in terms of geometric errors, and the error is compensated by using a genetic algorithm.
© 2009 Chinese Optics Letters
Joonku Hahn, Hwi Kim, Yongjun Lim, Eun-Hee Kim, and Byoungho Lee, "Spatial phase-shifting interferometry with compensation of geometric errors based on genetic algorithm," Chin. Opt. Lett. 7, 1113-1116 (2009)