OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 7, Iss. 12 — Dec. 1, 2009
  • pp: 1117–1122

In-line digital holography for dynamic metrology of MEMS

Vijay Raj Singh and Anand Asundi  »View Author Affiliations


Chinese Optics Letters, Vol. 7, Issue 12, pp. 1117-1122 (2009)


View Full Text Article

Acrobat PDF (2207 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

In-line digital holography helps to relax the spatial resolution requirement on charge-coupled device sensors for digital recording of holograms and to utilize the full sensing area for image reconstruction which provides larger field of view and better imaging resolution. In this letter, a lensless in-line digital holographic microscopy is presented for dynamic metrology of micro-electro-mechanical systems devices. The methodologies of interferometry and time-averaged in-line digital holography are presented for dynamic measurements, which are also useful for simultaneous suppression of in-line waves from real image wave. The experimental results are presented for dynamic thermal characterization of microheater and vibration analysis of cantilevers.

© 2009 Chinese Optics Letters

OCIS Codes
(090.2880) Holography : Holographic interferometry
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.7280) Instrumentation, measurement, and metrology : Vibration analysis
(090.1995) Holography : Digital holography

Citation
Vijay Raj Singh and Anand Asundi, "In-line digital holography for dynamic metrology of MEMS," Chin. Opt. Lett. 7, 1117-1122 (2009)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-7-12-1117


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. C. M. Vest, Holographic Interferometry (Wiely, New York, 1992).
  2. U. Schnars and W. Jüptner, Appl. Opt. 33, 179 (1994).
  3. L. Ma, H. Wang, Y. Li, and H. Jin, J. Opt. A: Pure Appl. Opt. 6, 396 (2004).
  4. A. Asundi and V. R. Singh, Meas. Sci. Technol. 17, 75 (2006).
  5. A. Asundi and V. R. Singh, Opt. Lett. 31, 2420 (2006).
  6. N. Maluf, An Introduction to Microelectromechanical Systems (Artech House, Boston, 2000).
  7. M. J. Madou, Fundamentals of Microfabrication (CRCPress, Boca Raton, 1998).
  8. A. Asundi and V. R. Singh, J. Holography Speckle 3, 103 (2006).
  9. L. Xu, X. Peng, J. Miao, and A. Asundi, Appl. Opt. 40, 5046 (2001).
  10. G. Coppola, P. Ferraro, M. Iodice, S. De Nicola, A. Finizio, and S. Grilli, Meas. Sci. Technol. 15, 529 (2004).
  11. V. R. Singh, J. Miao, Z. Wang, G. Hegde, and A. Asundi, Opt. Commun. 280, 285 (2007).
  12. L. Xu, J. Miao, and A. Asundi, Opt. Eng. 39, 3214 (2000).
  13. L. Xu, P. Z. Guo, M. Jianmin, and A. Asundi, Opt. Express 13, 2444 (2005).
  14. J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1996).
  15. U. Schnars and W. P. O. Jüptner, Meas. Sci. Technol. 13, R85 (2002).
  16. R. L. Powell and K. A. Stetson, J. Opt. Soc. Am. 55, 1593 (1965).
  17. B. Jayaraman, N. Bhat, and R. Pratap, J. Micromech. Microeng. 19, 085006 (2009).
  18. A. Andrei, K. Krupa, M. Jozwik, P. Delobelle, L. Hirsinger, C. Gorecki, L. Nieradko, and C. Meunier, Sens. Actuat. A 141, 565 (2008).
  19. P. Picart, J. Leval, D. Mounier, and S. Gougeon, Appl. Opt. 44, 337 (2005).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited