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Chinese Optics Letters

Chinese Optics Letters

| PUBLISHED MONTHLY BY CHINESE LASER PRESS AND DISTRIBUTED BY OSA

  • Vol. 7, Iss. 2 — Jan. 10, 2009
  • pp: 162–164

Influences of Y2O3 dopant content on residual stress, structure, and optical properties of ZrO2 thin films

Qiling Xiao, Shuying Shao, Jianda Shao, and Zhengxiu Fan  »View Author Affiliations


Chinese Optics Letters, Vol. 7, Issue 2, pp. 162-164 (2009)


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Abstract

Four kinds of Y2O3 stabilized ZrO2 (YSZ) thin films with different Y2O3 contents (from 0 to 12 mol%) are deposited on BK7 glass substrates by electron-beam evaporation method. The effects of different Y2O3 dopant contents on residual stress, structure, and optical properties of ZrO2 thin films are investigated. The results show that residual stress in YSZ thin films varies from tensile to compressive with the increase of Y2O3 molar content. The addition of Y2O3 is beneficial to the crystallization of YSZ thin film and transformation from amorphous to high temperature phase, and the refractive index decreases with the increase of Y2O3 molar content. Moreover, the variations of residual stress and the shifts of refractive index correspond to the evolution of structures induced by the addition of Y2O3.

© 2009 Chinese Optics Letters

OCIS Codes
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(160.4670) Materials : Optical materials
(310.6870) Thin films : Thin films, other properties

Citation
Qiling Xiao, Shuying Shao, Jianda Shao, and Zhengxiu Fan, "Influences of Y2O3 dopant content on residual stress, structure, and optical properties of ZrO2 thin films," Chin. Opt. Lett. 7, 162-164 (2009)
http://www.opticsinfobase.org/col/abstract.cfm?URI=col-7-2-162

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