OSA's Digital Library

Chinese Optics Letters

Chinese Optics Letters


  • Vol. 7, Iss. 2 — Jan. 10, 2009
  • pp: 162–164

Influences of Y2O3 dopant content on residual stress, structure, and optical properties of ZrO2 thin films

Qiling Xiao, Shuying Shao, Jianda Shao, and Zhengxiu Fan  »View Author Affiliations

Chinese Optics Letters, Vol. 7, Issue 2, pp. 162-164 (2009)

View Full Text Article

Acrobat PDF (341 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

  • Export Citation/Save Click for help


Four kinds of Y2O3 stabilized ZrO2 (YSZ) thin films with different Y2O3 contents (from 0 to 12 mol%) are deposited on BK7 glass substrates by electron-beam evaporation method. The effects of different Y2O3 dopant contents on residual stress, structure, and optical properties of ZrO2 thin films are investigated. The results show that residual stress in YSZ thin films varies from tensile to compressive with the increase of Y2O3 molar content. The addition of Y2O3 is beneficial to the crystallization of YSZ thin film and transformation from amorphous to high temperature phase, and the refractive index decreases with the increase of Y2O3 molar content. Moreover, the variations of residual stress and the shifts of refractive index correspond to the evolution of structures induced by the addition of Y2O3.

© 2009 Chinese Optics Letters

OCIS Codes
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(160.4670) Materials : Optical materials
(310.6870) Thin films : Thin films, other properties

Qiling Xiao, Shuying Shao, Jianda Shao, and Zhengxiu Fan, "Influences of Y2O3 dopant content on residual stress, structure, and optical properties of ZrO2 thin films," Chin. Opt. Lett. 7, 162-164 (2009)

Sort:  Author  |  Year  |  Journal  |  Reset


  1. M. G. Krishna, K. N. Rao, and S. Mohan, J. Vac. Sci. Technol. A 10, 3451 (1992).
  2. D. Zhang, M. Zhan, M. Fang, H. He, J. Shao, and Z. Fan, Chin. Opt. Lett. 2, 364 (2004).
  3. G. Laukaitis, J. Dudonis, and D. Milcius, Thin Solid Films 515, 678 (2006).
  4. W. T. Pawlewicz and D. D. Hays, Thin Solid Films 94, 31 (1982).
  5. J. T. Chang, C. H. Yeh, J. L. He, K. C. Chen, A. Matthews, and A. Leyland, Surf. Coat. Technol. 200, 1401 (2005).
  6. S. Sprio, S. Guicciardi, A. Bellosi, and G. Pezzotti, Surf. Coat. Technol. 200, 4579 (2006).
  7. M. Fukutomi, S. Aoki, K. Komori, Y. Tanaka, T. Asano, and H. Maeda, Thin Solid Films 239, 123 (1994).
  8. S. Wu, J. Shao, K. Yi, and Z. Fan, "Y2O3 stabilized ZrO2 vacuum coating material and its preparation" (in Chinese) Chinese Patent CN1696328 (2005).
  9. P. Gao, L. J. Meng, M. P. dos Santos, V. Teixeira, and M. Andritschky, Thin Solid Films 377, 557 (2000).
  10. J. C. Manifacier, J. Gasiot, and J. P. Fillard, J. Phys. E 9, 1002 (1976).
  11. M. Boulouz, L. Martin, A. Boulouz, and A. Boyer, Mater. Sci. Eng. B 67, 122 (1999).
  12. M. Harris, H. A. Macleod, S. Ogura, E. Pelletier, and B. Vidal, Thin Solid Films 57, 173 (1979).
  13. J. Tang, P. Gu, X. Liu, and H. Li, Modern Optical Thin Films Technology (Zhejiang University Press, Hangzhou, 2006) p.244.
  14. J. Ullmann, A. J. Kellock, and J. E. E. Baglin, Thin Solid Films 341, 238 (1999).
  15. E. Klockholm, J. Vac. Sci. Technol. 6, 138 (1968).

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited